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Title: Medium scale carbon nanotube thin film integrated circuits on flexible plastic substrates

Abstract

The present invention provides device components geometries and fabrication strategies for enhancing the electronic performance of electronic devices based on thin films of randomly oriented or partially aligned semiconducting nanotubes. In certain aspects, devices and methods of the present invention incorporate a patterned layer of randomly oriented or partially aligned carbon nanotubes, such as one or more interconnected SWNT networks, providing a semiconductor channel exhibiting improved electronic properties relative to conventional nanotubes-based electronic systems.

Inventors:
; ; ;
Issue Date:
Research Org.:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1169084
Patent Number(s):
8946683
Application Number:
12/996,924
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
DOE Contract Number:  
FG02-07ER46471
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

Citation Formats

Rogers, John A, Cao, Qing, Alam, Muhammad, and Pimparkar, Ninad. Medium scale carbon nanotube thin film integrated circuits on flexible plastic substrates. United States: N. p., 2015. Web.
Rogers, John A, Cao, Qing, Alam, Muhammad, & Pimparkar, Ninad. Medium scale carbon nanotube thin film integrated circuits on flexible plastic substrates. United States.
Rogers, John A, Cao, Qing, Alam, Muhammad, and Pimparkar, Ninad. Tue . "Medium scale carbon nanotube thin film integrated circuits on flexible plastic substrates". United States. https://www.osti.gov/servlets/purl/1169084.
@article{osti_1169084,
title = {Medium scale carbon nanotube thin film integrated circuits on flexible plastic substrates},
author = {Rogers, John A and Cao, Qing and Alam, Muhammad and Pimparkar, Ninad},
abstractNote = {The present invention provides device components geometries and fabrication strategies for enhancing the electronic performance of electronic devices based on thin films of randomly oriented or partially aligned semiconducting nanotubes. In certain aspects, devices and methods of the present invention incorporate a patterned layer of randomly oriented or partially aligned carbon nanotubes, such as one or more interconnected SWNT networks, providing a semiconductor channel exhibiting improved electronic properties relative to conventional nanotubes-based electronic systems.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Feb 03 00:00:00 EST 2015},
month = {Tue Feb 03 00:00:00 EST 2015}
}

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Interfacial Chemistries for Nanoscale Transfer Printing
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Soft, conformable electrical contacts for organic semiconductors: High-resolution plastic circuits by lamination
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Transfer printing by kinetic control of adhesion to an elastomeric stamp
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Improved Surface Chemistries, Thin Film Deposition Techniques, and Stamp Designs for Nanotransfer Printing
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Micro- and Nanopatterning Techniques for Organic Electronic and Optoelectronic Systems
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Printing meets lithography: Soft approaches to high-resolution patterning
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Plastic Electronics and Their Packaging Technologies
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High-mobility ultrathin semiconducting films prepared by spin coating
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Ink-Jet Printing of Binders for Ceramic Components
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Individually Suspended Single-Walled Carbon Nanotubes in Various Surfactants
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High-Luminosity Blue and Blue-Green Gallium Nitride Light-Emitting Diodes
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Polarization Dependence of the Optical Absorption of Single-Walled Carbon Nanotubes
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Nanotubes of the disulfides of groups 4 and 5 metals
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Macroelectronic applications of carbon nanotube networks
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Nerve agent detection using networks of single-walled carbon nanotubes
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Band Gap Fluorescence from Individual Single-Walled Carbon Nanotubes
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Field Configured Assembly: Programmed Manipulation and Self-assembly at the Mesoscale
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Improved Pattern Transfer in Soft Lithography Using Composite Stamps
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High-Performance Semiconducting Polythiophenes for Organic Thin-Film Transistors
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Design of High-Performance Regioregular Polythiophenes for Organic Thin-Film Transistors
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Nanobelts of Semiconducting Oxides
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Sharp exciton emission from single InAs quantum dots in GaAs nanowires
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Application of Screen Printing in the Fabrication of Organic Light-Emitting Devices
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Block Copolymer Lithography: Periodic Arrays of 1011 Holes in 1 Square Centimeter
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Fabrication of Three-Dimensional Macroporous Membranes with Assemblies of Microspheres as Templates
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GaN: Processing, defects, and devices
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Performance Assessment of Subpercolating Nanobundle Network Thin-Film Transistors by an Analytical Model
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Performance assessment of sub-percolating nanobundle network transistors by an analytical model
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Theory and practice of “Striping” for improved ON/OFF Ratio in carbon nanonet thin film transistors
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Hall Effect in the Accumulation Layers on the Surface of Organic Semiconductors
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Ultrathin epitaxial germanium on crystalline oxide metal-oxide-semiconductor-field-effect transistors
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Stars and stripes. Nanoscale misfit dislocation patterns on surfaces
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From Micro- to Nanofabrication with Soft Materials
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Drain voltage scaling in carbon nanotube transistors
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Study of Mesa Undercuts Produced in GaAs with H3PO4-Based Etchants
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Nanotube electronics: Large-scale assembly of carbon nanotubes
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High-power laser diodes based on InGaAsP alloys
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Macroelectronics: Perspectives on Technology and Applications
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Bulk micromachining characterization of 0.2 μm HEMT MMIC technology for GaAs MEMS design
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All-Inorganic Field Effect Transistors Fabricated by Printing
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Large-scale purification of single-wall carbon nanotubes: process, product, and characterization
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Looking at Rubber Adhesion
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GaAs Readied for High-Speed Microcircuits
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Using an elastomeric phase mask for sub-100 nm photolithography in the optical near field
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Generating ∼90 nanometer features using near-field contact-mode photolithography with an elastomeric phase mask
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Quantifying distortions in soft lithography
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Using printing and molding techniques to produce distributed feedback and Bragg reflector resonators for plastic lasers
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Organic smart pixels and complementary inverter circuits formed on plastic substrates by casting and rubber stamping
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Paper-like electronic displays: Large-area rubber-stamped plastic sheets of electronics and microencapsulated electrophoretic inks
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Printed plastic electronics and paperlike displays
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Rubber Stamping for Plastic Electronics and Fiber Optics
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Toward Paperlike Displays
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High Performance Electrolyte Gated Carbon Nanotube Transistors
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Universal description of channel conductivity for nanotube and nanowire transistors
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Photonic crystal structure with square symmetry within each layer and a three-dimensional band gap
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Semiconductor nanowires for novel one-dimensional devices
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Nature of multilayer steps on the {100} cleavage planes of MgO single crystals
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Morphology of nanostructured materials
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Low-Temperature Materials and Thin Film Transistors for Flexible Electronics
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Structures of quartz (100)- and (101)-water interfaces determined by x-ray reflectivity and atomic force microscopy of natural growth surfaces
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Preparation of Metallic Films on Elastomeric Stamps and Their Application for Contact Processing and Contact Printing
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The Effectiveness of Silane Adhesion Promoters in the Performance of Polyurethane Adhesives
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Percolation and conductivity: A computer study. II
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High-Current Nanotube Transistors
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Bending experiment on pentacene field-effect transistors on plastic films
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A large-area wireless power-transmission sheet using printed organic transistors and plastic MEMS switches
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Nonequilibrium processes for generating silicon nanostructures in single-crystalline silicon
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Functional Pixel Circuits for Elastic AMOLED Displays
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Holographic photonic crystals with diamond symmetry
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Organic thin-film transistor-driven polymer-dispersed liquid crystal displays on flexible polymeric substrates
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Formation and characterization of silicon films on flexible polymer substrates
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Insights on Charge Transfer Doping and Intrinsic Phonon Line Shape of Carbon Nanotubes by Simple Polymer Adsorption
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Direct mask-free patterning of molecular organic semiconductors using organic vapor jet printing
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Direct, Mask- and Solvent-Free Printing of Molecular Organic Semiconductors
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Axisymmetric adhesion tests of soft materials
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Progress in Plastic Electronics Devices
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Inkjet Printing of Functional Materials
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High-Resolution Inkjet Printing of All-Polymer Transistor Circuits
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Device Physics of Solution-Processed Organic Field-Effect Transistors
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Colloidal Inks for Directed Assembly of 3-D Periodic Structures
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Electric-field assisted assembly and alignment of metallic nanowires
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Random networks of carbon nanotubes as an electronic material
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High-mobility carbon-nanotube thin-film transistors on a polymeric substrate
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Conformable, flexible, large-area networks of pressure and thermal sensors with organic transistor active matrixes
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Integration of Organic FETs With Organic Photodiodes for a Large Area, Flexible, and Lightweight Sheet Image Scanners
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A large-area, flexible pressure sensor matrix with organic field-effect transistors for artificial skin applications
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Formation of Pb/63Sn solder bumps using a solder droplet jetting method
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A buckling-based metrology for measuring the elastic moduli of polymeric thin films
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Nanotube Optoelectronic Memory Devices
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Lattice-Oriented Growth of Single-Walled Carbon Nanotubes
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A scalable CVD method for the synthesis of single-walled carbon nanotubes with high catalyst productivity
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Fabricating Semiconductor Nano/Microwires and Transfer Printing Ordered Arrays of Them onto Plastic Substrates
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Advances in organic field-effect transistors
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Bendable GaAs metal-semiconductor field-effect transistors formed with printed GaAs wire arrays on plastic substrates
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Photolithographic Route to the Fabrication of Micro/Nanowires of III-V Semiconductors
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Elastomeric Transistor Stamps: Reversible Probing of Charge Transport in Organic Crystals
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Mechanics of rollable and foldable film-on-foil electronics
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Polymers and carbon nanotubes—dimensionality, interactions and nanotechnology
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Hydrogen storage in C70 encapsulated single-walled carbon nanotube
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Magnetic trapping and self-assembly of multicomponent nanowires
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One-Dimensional Assemblies of Nanoparticles: Preparation, Properties, and Promise
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Langmuir−Blodgett Silver Nanowire Monolayers for Molecular Sensing Using Surface-Enhanced Raman Spectroscopy
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Crystalline Ropes of Metallic Carbon Nanotubes
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Photonic Band Gap Architectures for Holographic Lithography
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Photonic Band Gaps Based on Tetragonal Lattices of Slanted Pores
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Solution-Liquid-Solid Growth of Crystalline III-V Semiconductors: An Analogy to Vapor-Liquid-Solid Growth
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Porous silica via colloidal crystallization
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Molecular control over Au/GaAs diodes
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Theory of the field-effect mobility in amorphous organic transistors
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On-chip natural assembly of silicon photonic bandgap crystals
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Cheap and cheerful circuits
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Silicon for thin-film transistors
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Electronic skin: architecture and components
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A Solution-Phase, Precursor Route to Polycrystalline SnO2 Nanowires That Can Be Used for Gas Sensing under Ambient Conditions
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Electronically Selective Chemical Functionalization of Carbon Nanotubes: Correlation between Raman Spectral and Electrical Responses
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A Novel Low-Cost, High-Efficiency Micromachined Silicon Solar Cell
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Large-Scale Hierarchical Organization of Nanowire Arrays for Integrated Nanosystems
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Functional nanoparticle architectures for sensoric, optoelectronic, and bioelectronic applications
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Vertical scaling of carbon nanotube field-effect transistors using top gate electrodes
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Effect of Mechanical and Electrical Stresses on the Performance of an a-Si:H TFT on Plastic Substrate
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Thermal oxide of polycrystalline silicon on steel foil as a thin-film transistor gate dielectric
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Growth of Au-catalyzed ordered GaAs nanowire arrays by molecular-beam epitaxy
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Growth, branching, and kinking of molecular-beam epitaxial <110> GaAs nanowires
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Soft Lithography
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Unconventional Methods for Fabricating and Patterning Nanostructures
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One-Dimensional Nanostructures: Synthesis, Characterization, and Applications
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High-mobility thin-film transistors based on aligned carbon nanotubes
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Mesoporous silica with micrometer-scale designs
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Stability of low-temperature amorphous silicon thin film transistors formed on glass and transparent plastic substrates
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  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 18, Issue 2, p. 683-689
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Creating Periodic Three-Dimensional Structures by Multibeam Interference of Visible Laser
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The Chemistry and Physics of Semiconductor Nanowires
journal, February 2005


Terraces and ledges on (001) spinel surfaces
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High-Field Electrical Transport in Single-Wall Carbon Nanotubes
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Fluidic self-assembly for the integration of GaAs light-emitting diodes on Si substrates
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Colloidal nanocrystal synthesis and the organic–inorganic interface
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Low-Voltage Organic Field-Effect Transistors and Inverters Enabled by Ultrathin Cross-Linked Polymers as Gate Dielectrics
journal, July 2005


Solution–Liquid–Solid Growth of Soluble GaAs Nanowires
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Two-versus three-dimensional quantum confinement in indium phosphide wires and dots
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Small-Angle Neutron Scattering from Surfactant-Assisted Aqueous Dispersions of Carbon Nanotubes
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Carbon Structures with Three-Dimensional Periodicity at Optical Wavelengths
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Nanoscale organic transistors that use source/drain electrodes supported by high resolution rubber stamps
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Three-Dimensional and Multilayer Nanostructures Formed by Nanotransfer Printing
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Electric-field-directed growth of aligned single-walled carbon nanotubes
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CVD synthesis and purification of single-walled carbon nanotubes on aerogel-supported catalyst
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Shape-and-solder-directed self-assembly to package semiconductor device segments
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An Efficient Two-Photon-Generated Photoacid Applied to Positive-Tone 3D Microfabrication
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p-Channel, n-Channel Thin Film Transistors and p−n Diodes Based on Single Wall Carbon Nanotube Networks
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Band Structure, Phonon Scattering, and the Performance Limit of Single-Walled Carbon Nanotube Transistors
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High contrast organic light-emitting devices with improved electrical characteristics
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Flexible substrate micro-crystalline silicon and gated amorphous silicon strain sensors
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Spin on dopants for high-performance single-crystal silicon transistors on flexible plastic substrates
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Organic-Inorganic Hybrid Materials as Semiconducting Channels in Thin-Film Field-Effect Transistors
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Charge Pumping in Carbon Nanotubes
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Bendable single crystal silicon thin film transistors formed by printing on plastic substrates
journal, February 2005


Intermetallic formation in gold-aluminum systems
journal, October 1970


Aluminum metallization—Advantages and limitations for integrated circuit applications
journal, January 1969


Ambipolar Pentacene Field-Effect Transistors and Inverters
journal, February 2000


Organic field-effect transistors with bending radius down to 1 mm
journal, January 2004


Microscopic patterning of orientated mesoscopic silica through guided growth
journal, December 1997


    Works referencing / citing this record:

    Medium scale carbon nanotube thin film integrated circuits on flexible plastic substrates
    patent, February 2015