Process and structures for fabrication of solar cells with laser ablation steps to form contact holes

Harley, Gabriel; Smith, David D; Dennis, Tim; Waldhauer, Ann; Kim, Taeseok; Cousins, Peter John

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Title: Process and structures for fabrication of solar cells with laser ablation steps to form contact holes

Abstract

Contact holes of solar cells are formed by laser ablation to accomodate various solar cell designs. Use of a laser to form the contact holes is facilitated by replacing films formed on the diffusion regions with a film that has substantially uniform thickness. Contact holes may be formed to deep diffusion regions to increase the laser ablation process margins. The laser configuration may be tailored to form contact holes through dielectric films of varying thickness.

Inventors:: Harley, Gabriel; Smith, David D; Dennis, Tim; Waldhauer, Ann; Kim, Taeseok; Cousins, Peter John

Issue Date:: Tue Nov 19 00:00:00 EST 2013

Research Org.:: SunPower Corporation (San Jose, CA)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1108939

Patent Number(s):: 8586403

Application Number:: 13/028,059

Assignee:: SunPower Corporation (San Jose, CA)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L31/02168 - {the coatings being antireflective or having enhancing optical properties for the solar cells}
H01L31/022441 - {Electrode arrangements specially adapted for back-contact solar cells}
H01L31/0682 - {back-junction, i.e. rearside emitter, solar cells, e.g. interdigitated base-emitter regions back-junction cells}
H01L31/1804 - {comprising only elements of Group IV of the Periodic System}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
Y02E10/52 - PV systems with concentrators
Y02E10/547 - Monocrystalline silicon PV cells

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02P - CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
Y02P70/50 - Manufacturing or production processes characterised by the final manufactured product

Show less

DOE Contract Number:: FC36-07GO17043

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 14 SOLAR ENERGY

Citation Formats


                    Harley, Gabriel, Smith, David D, Dennis, Tim, Waldhauer, Ann, Kim, Taeseok, and Cousins, Peter John. Process and structures for fabrication of solar cells with laser ablation steps to form contact holes.  United States: N. p., 2013. 
        Web.

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                    Harley, Gabriel, Smith, David D, Dennis, Tim, Waldhauer, Ann, Kim, Taeseok, & Cousins, Peter John. Process and structures for fabrication of solar cells with laser ablation steps to form contact holes.  United States.

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                    Harley, Gabriel, Smith, David D, Dennis, Tim, Waldhauer, Ann, Kim, Taeseok, and Cousins, Peter John. Tue .  
        "Process and structures for fabrication of solar cells with laser ablation steps to form contact holes".  United States.  https://www.osti.gov/servlets/purl/1108939.

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@article{osti_1108939,

  title        = {Process and structures for fabrication of solar cells with laser ablation steps to form contact holes},

  author       = {Harley, Gabriel and Smith, David D and Dennis, Tim and Waldhauer, Ann and Kim, Taeseok and Cousins, Peter John},

  abstractNote = {Contact holes of solar cells are formed by laser ablation to accomodate various solar cell designs. Use of a laser to form the contact holes is facilitated by replacing films formed on the diffusion regions with a film that has substantially uniform thickness. Contact holes may be formed to deep diffusion regions to increase the laser ablation process margins. The laser configuration may be tailored to form contact holes through dielectric films of varying thickness.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Nov 19 00:00:00 EST 2013},

  month        = {Tue Nov 19 00:00:00 EST 2013}

}

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Similar Records

Title: Process and structures for fabrication of solar cells with laser ablation steps to form contact holes

Abstract

Citation Formats

Photovoltaic device patent, April 1998

Array substrate patent, August 2010

Trench Process And Structure For Backside Contact Solar Cells With Polysilicon Doped Regions patent-application, December 2009

Method for Producing Doped Regions in a Substrate, and Photovoltaic Cell patent-application, March 2008

Solar cells and methods for manufacture thereof patent, March 1982

Method of fabricating a silicon solar cell patent, July 2002

Template for Pyramidal Three-Dimensional Thin-Film Solar Cell Manufacturing and Methods of Use patent-application, April 2009

Semiconductor interconnection device with both n- and p-doped regions patent, October 1998

Fabrication methods of thin film transistor substrates patent, June 2010

Method for manufacturing divided waveplate filter patent, August 2010

Methods of fabricating solar-cell structures and resulting solar-cell structures patent-application, July 2009

Method of fabricating back surface point contact solar cells patent, May 1990

Method of direct Coulomb explosion in laser ablation of semiconductor structures patent, July 2010

System and method for eliminating the structure and edge roughness produced during laser ablation of a material patent, June 2010

Template for three-dimensional thin-film solar cell manufacturing and methods of use patent, March 2012

Array of small contacts for solar cell fabrication patent-application, December 2008

Integrated Photodiode for Semiconductor Substrates patent-application, April 2010

Laser beam waveguide and laser beam delivery system including same patent, March 1996

Template for Three-Dimensional Thin-Film Solar Cell Manufacturing and Methods of Use patent-application, July 2008

Ion Implantation Fabrication Process for Thin-Film Crystalline Silicon Solar Cells patent-application, December 2010

Anti-Reflective Coating With High Optical Absorption Layer For Backside Contact Solar Cells patent-application, June 2009

Methods for forming mutiple-layer electrode structures for silicon photovoltaic cells patent-application, September 2009

Electroluminescent laminate with thick film dielectric patent, July 1995

Singulating semiconductor wafers to form semiconductor chips patent, September 2010

Process and fabrication methods for emitter wrap through back contact solar cells patent-application, March 2006

Laser Processing for High-Efficiency Thin Crystalline Silicon Solar Cell Fabrication patent-application, February 2012

Preventing harmful polarization of solar cells patent-application, September 2006

Photovoltaic device
patent, April 1998

Array substrate
patent, August 2010

Trench Process And Structure For Backside Contact Solar Cells With Polysilicon Doped Regions
patent-application, December 2009

Method for Producing Doped Regions in a Substrate, and Photovoltaic Cell
patent-application, March 2008

Solar cells and methods for manufacture thereof
patent, March 1982

Method of fabricating a silicon solar cell
patent, July 2002

Template for Pyramidal Three-Dimensional Thin-Film Solar Cell Manufacturing and Methods of Use
patent-application, April 2009

Semiconductor interconnection device with both n- and p-doped regions
patent, October 1998

Fabrication methods of thin film transistor substrates
patent, June 2010

Method for manufacturing divided waveplate filter
patent, August 2010

Methods of fabricating solar-cell structures and resulting solar-cell structures
patent-application, July 2009

Method of fabricating back surface point contact solar cells
patent, May 1990

Method of direct Coulomb explosion in laser ablation of semiconductor structures
patent, July 2010

System and method for eliminating the structure and edge roughness produced during laser ablation of a material
patent, June 2010

Template for three-dimensional thin-film solar cell manufacturing and methods of use
patent, March 2012

Array of small contacts for solar cell fabrication
patent-application, December 2008

Integrated Photodiode for Semiconductor Substrates
patent-application, April 2010

Laser beam waveguide and laser beam delivery system including same
patent, March 1996

Template for Three-Dimensional Thin-Film Solar Cell Manufacturing and Methods of Use
patent-application, July 2008

Ion Implantation Fabrication Process for Thin-Film Crystalline Silicon Solar Cells
patent-application, December 2010

Anti-Reflective Coating With High Optical Absorption Layer For Backside Contact Solar Cells
patent-application, June 2009

Methods for forming mutiple-layer electrode structures for silicon photovoltaic cells
patent-application, September 2009

Electroluminescent laminate with thick film dielectric
patent, July 1995

Singulating semiconductor wafers to form semiconductor chips
patent, September 2010

Process and fabrication methods for emitter wrap through back contact solar cells
patent-application, March 2006

Laser Processing for High-Efficiency Thin Crystalline Silicon Solar Cell Fabrication
patent-application, February 2012

Preventing harmful polarization of solar cells
patent-application, September 2006