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Title: Peak reflectivity measurements of W/C, Mo/Si, and Mo/B sub 4 C multilayer mirrors in the 8--190-A range using both K. alpha. line and synchrotron radiation

Journal Article · · Applied Optics; (USA)
DOI:https://doi.org/10.1364/AO.29.003694· OSTI ID:6329326
; ; ;  [1]; ; ;  [2]
  1. Johns Hopkins University, Baltimore, MD (USA)
  2. U.S. National Institute of Standards Technology, Gaithersburg, MD (USA)

Peak reflectivity measurements of W/C, Mo/Si, and Mo/B{sub 4}C multilayer mirrors have been performed using line and synchrotron radiation in the 8--190-A wavelength range. Short wavelength measurements using a line source were corrected for nonmonochromatic and divergent incident radiation. Reflectivities of Mo/Si mirrors, measured with synchrotron radiation, ranged from 25 to 44% but decreased significantly around the Si absorption edge. Mo/B{sub 4}C multilayer mirrors were measured that had peak reflectivities from 10 to 25% between 90 and 200 A and bandpasses as small as 3 A. Key words: Multilayer mirrors, peak reflectivity.

DOE Contract Number:
FG02-86ER53214
OSTI ID:
6329326
Journal Information:
Applied Optics; (USA), Vol. 29:25; ISSN 0003-6935
Country of Publication:
United States
Language:
English