Enhanced dielectric and ferroelectric properties of Pb(Zr{sub 0.8}Ti{sub 0.2})O{sub 3}/Pb(Zr{sub 0.2}Ti{sub 0.8})O{sub 3} multilayer films

Journal Article · Mon Sep 17 00:00:00 EDT 2007 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.2783482· OSTI ID:21013626

Hong, Liu; Xiaogang, Gong; Jine, Liang; Xuedong, Li; Dingquan, Xiao; Jianguo, Zhu; Zhaohui, Pu ^[1]

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1. College of Materials Science and Engineering, Sichuan University, Chengdu 610064 (China)

A series of Pb(Zr{sub 1-x}Ti{sub x})O{sub 3} multilayer films consisted of Pb(Zr{sub 0.8}Ti{sub 0.2})O{sub 3} and Pb(Zr{sub 0.2}Ti{sub 0.8})O{sub 3} were deposited on Pt/Ti/SiO{sub 2}/Si substrates by using radio frequency magnetron sputtering. All the films comprise six periodicities of Pb(Zr{sub 0.8}Ti{sub 0.2})O{sub 3}/Pb(Zr{sub 0.2}Ti{sub 0.8})O{sub 3} with periodicity thickness of 133 nm, but the layer thicknesses of rhombohedral phase and tetragonal phase in one periodicity are varied. The films with two layer thickness ratio of 1:3 possess enhanced dielectric and ferroelectric properties: dielectric constant {epsilon}{sub r}=328 at 10 kHz, dielectric loss tg{delta}=0.0098, and sharply enhanced remanent polarization P{sub r}=32.6 {mu}C/cm{sup 2}. The layer structure and interlayer stress of Pb(Zr{sub 1-x}Ti{sub x})O{sub 3} multilayer films play important roles in the electric enhancement.

• OSTI ID: 21013626
• Journal Information: Applied Physics Letters, Vol. 91, Issue 12; Other Information: DOI: 10.1063/1.2783482; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
DEPOSITION
FERROELECTRIC MATERIALS
KHZ RANGE 01-100
LAYERS
PERIODICITY
PERMITTIVITY
PLATINUM
POLARIZATION
PZT
RADIOWAVE RADIATION
RESIDUAL STRESSES
SILICON
SILICON OXIDES
SPUTTERING
SUBSTRATES
THICKNESS
THIN FILMS
TITANIUM