Industrial Applications of Low Temperature Plasmas

Conference · Thu Mar 15 00:00:00 EST 2001

DOI:https://doi.org/10.1063/1.56165· OSTI ID:15013263

Bardsley, J N

The use of low temperature plasmas in industry is illustrated by the discussion of four applications, to lighting, displays, semiconductor manufacturing and pollution control. The type of plasma required for each application is described and typical materials are identified. The need to understand radical formation, ionization and metastable excitation within the discharge and the importance of surface reactions are stressed.

• Research Organization: Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 15013263
• Report Number(s): UCRL-JC-143047; TRN: US0600885
• Resource Relation: Conference: Display Search Conference, Austin, TX, Mar 20 - Mar 22, 2001
• Country of Publication: United States
• Language: English

Related Subjects

54 ENVIRONMENTAL SCIENCES
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
EXCITATION
IONIZATION
MANUFACTURING
PLASMA
POLLUTION CONTROL
RADICALS