Semiconductive micro- and nano-wire array manufacturing
Patent
·
OSTI ID:1183341
The disclosure provides methods of manufacturing semiconductive structures using stamping and VLS techniques.
- Research Organization:
- California Institute of Technology (CalTech), Pasadena, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- FG02-05ER15754
- Assignee:
- California Institute of Technology (Pasadena, CA)
- Patent Number(s):
- 9,048,097
- Application Number:
- 13/972,809
- OSTI ID:
- 1183341
- Country of Publication:
- United States
- Language:
- English
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