Substrate inspection

Ramachandran, Mahendra Prabhu; Meeks, Steven W; Sappey, Romain

Title: Substrate inspection

Patent · Tue May 27 00:00:00 EDT 2014

OSTI ID:1132598

Ramachandran, Mahendra Prabhu; Meeks, Steven W; Sappey, Romain

Various embodiments for substrate inspection are provided.

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Research Organization:: KLA-Tencor Corporation, Milpitas, CA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: EE0003159

Assignee:: KLA-Tencor Corp. (Milpitas, CA)

Patent Number(s):: 8,736,831

Application Number:: 13/472,421

OSTI ID:: 1132598

Resource Relation:: Patent File Date: 2012 May 15

Country of Publication:: United States

Language:: English

References (18)

Defect detection using fourier optics and a spatial separator for simultaneous optical computing of separated fourier transform components Hendler, Lawrence; Watts, Michael P. C. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5506676 US Patent Document 5,506,676	patent	April 1996
Process and apparatus for laser analysis of surface having a repetitive texture pattern Meeks, Steven W.; Nguyen, Thao Anh; Sargent, Fior D. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5539213 US Patent Document 5,539,213	patent	July 1996
Process and apparatus for controlled laser texturing of magnetic recording disk Baumgart, Peter Michael; Gudeman, Christopher S.; Krajnovich, Douglas J. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5586040 US Patent Document 5,586,040	patent	December 1996
Radiation filter, spectrometer and imager using a micro-mirror array Fateley, William G. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6392748 US Patent Document 6,392,748	patent	May 2002
Method for discriminating between holes in and particles on a film covering a substrate Stover, John C.; Eremin, Yuri A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6486946 US Patent Document 6,486,946	patent	November 2002
Defect detection system Vaez-Iravani, Mehdi; Rzepiela, Jeffrey; Treadwell, Carl https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6538730 US Patent Document 6,538,730	patent	March 2003
Apparatus for optical inspection of a working surface having a dynamic reflective spatial attenuator Le, Tuan D. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6643007 US Patent Document 6,643,007	patent	November 2003
Patterned wafer inspection using spatial filtering Some, Daniel https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6686602 US Patent Document 6,686,602	patent	February 2004
Inspection system for integrated applications Vaez-Iravani, Mehdi https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7116413 US Patent Document 7,116,413	patent	October 2006
Appearance inspection apparatus and projection method for projecting image of sample under inspection Kurosawa, Toshiro; Yamazaki, Shohei; Miyazaki, Yoko https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7330265 US Patent Document 7,330,265	patent	February 2008
Simultaneous multi-spot inspection and imaging Vaez-Iravani, Mehdi; Miller, Lawrence R. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7492451 US Patent Document 7,492,451	patent	February 2009
Systems configured to inspect a specimen Chen, Grace Hsiu-Ling; Fu, Tao-Yi; Sullivan, Jamie M. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7535563 US Patent Document 7,535,563	patent	May 2009
Surface characteristic analysis Meeks, Steven W.; Sappey, Romain; Carr, Tom https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7554654 US Patent Document 7,554,654	patent	June 2009
System and method for hyper-spectral analysis Maggioni, Mauro M.; Coifman, Ronald R.; Coppi, Andreas https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7562057 US Patent Document 7,562,057	patent	July 2009
Method of imaging radiation from an object on a detection device and an inspection device for inspecting an object Snel, Robert; Bleeker, Arno Jan; van Brug, Hedser https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7697128 US Patent Document 7,697,128	patent	April 2010
Scattered light separation Meeks, Steven W. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7907269 US Patent Document 7,907,269	patent	March 2011
Metrology of thin film devices using an addressable micromirror array Genio, Edgar; Budiarto, Edward W. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8018586 US Patent Document 8,018,586	patent	September 2011
Wafer inspection system for distinguishing pits and particles Fossey, Michael E.; Stover, John C.; Clementi, Lee D. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040085533 US Patent Application 10/601698; 20040085533	patent-application	May 2004

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