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Title: Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics

Patent ·
OSTI ID:1132058
; ; ; ; ; ; ; ; ; ; ; ;

In an aspect, the present invention provides stretchable, and optionally printable, components such as semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed or otherwise deformed, and related methods of making or tuning such stretchable components. Stretchable semiconductors and electronic circuits preferred for some applications are flexible, in addition to being stretchable, and thus are capable of significant elongation, flexing, bending or other deformation along one or more axes. Further, stretchable semiconductors and electronic circuits of the present invention are adapted to a wide range of device configurations to provide fully flexible electronic and optoelectronic devices.

Research Organization:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
FG02-91ER45439
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
Patent Number(s):
8,729,524
Application Number:
13/441,598
OSTI ID:
1132058
Country of Publication:
United States
Language:
English

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Electric microcontact printing method and apparatus patent-application September 2003
Integration of InP/InGaAsP photodetectors onto silicon-on-insulator waveguide circuits journal January 2005
Angular displacement sensors patent February 1992
Methods for forming assemblies patent August 2001
Spatially Selective Guided Growth of High-Coverage Arrays and Random Networks of Single-Walled Carbon Nanotubes and Their Integration into Electronic Devices journal April 2006
Nanotransfer printing by use of noncovalent surface forces: Applications to thin-film transistors that use single-walled carbon nanotube networks and semiconducting polymers journal December 2004
Methods and apparatus for fluidic self assembly patent September 2003
Apparatuses and methods used in forming assemblies patent August 2001
Micron and submicron patterning of polydimethylsiloxane resists on electronic materials by decal transfer lithography and reactive ion-beam etching: Application to the fabrication of high-mobility, thin-film transistors journal October 2006
Stretchable and elastic interconnects patent-application September 2004
Organic species that facilitate charge transfer to or from nanostructures patent September 2005
High-mobility ultrathin semiconducting films prepared by spin coating journal March 2004
Ink-Jet Printing, Self-Assembled Polyelectrolytes, and Electroless Plating: Low Cost Fabrication of Circuits on a Flexible Substrate at Room Temperature journal February 2005
Guided Growth of Large-Scale, Horizontally Aligned Arrays of Single-Walled Carbon Nanotubes and Their Use in Thin-Film Transistors journal August 2005
Testing integrated circuit dice patent April 2002
Flexural rigidity of microtubules measured with the use of optical tweezers journal February 1996
Wafer-scale integration of GaAs optoelectronic devices with standard Si integrated circuits using a low-temperature bonding procedure journal December 2002
Improved Pattern Transfer in Soft Lithography Using Composite Stamps journal June 2002
Methods to fabricate thin film transistors and circuits patent May 2001
III–V micromachined devices for microsystems journal September 1998
Polymer-on-Polymer Stamping: Universal Approaches to Chemically Patterned Surfaces journal April 2002
Compliant thin film patterns of stiff materials as platforms for stretchable electronics journal December 2005
Surface-induced structure formation of polymer blends on patterned substrates journal February 1998
Silicon for thin-film transistors journal April 2003
Methods and devices for fabricating three-dimensional nanoscale structures patent-application December 2006
Organic-Inorganic Hybrid Materials as Semiconducting Channels in Thin-Film Field-Effect Transistors journal October 1999
Applications book January 1991
Stretchable gold conductors on elastomeric substrates journal April 2003
Semiconductor device and method of manufacturing the same patent-application May 2003
Nanoribbon Waveguides for Subwavelength Photonics Integration journal August 2004
Pattern Transfer Printing by Kinetic Control of Adhesion to an Elastomeric Stamp patent-application August 2009
Template-Free Directional Growth of Single-Walled Carbon Nanotubes on a- and r-Plane Sapphire journal April 2005
Method and apparatus for transferring blocks patent May 2004
Applications of nano-enabled large area macroelectronic substrates incorporating nanowires and nanowire composites patent-application June 2004
The Role of Metal−Nanotube Contact in the Performance of Carbon Nanotube Field-Effect Transistors journal July 2005
Direct-connect signaling system patent-application December 2003
Mechanically flexible thin-film transistors that use ultrathin ribbons of silicon derived from bulk wafers journal May 2006
Electronic skin: architecture and components journal November 2004
Large area, high resolution, dry printing of conducting polymers for organic electronics journal January 2003
Controlled buckling of semiconductor nanoribbons for stretchable electronics journal December 2006
Masterless Soft Lithography:  Patterning UV/Ozone−Induced Adhesion on Poly(dimethylsiloxane) Surfaces† journal October 2005
Flexible display designed for minimal mechanical strain patent-application June 2006
Method for preventing distortions in a flexibly transferred feature pattern patent December 2003
Direct measurement of interfacial interactions between semispherical lenses and flat sheets of poly(dimethylsiloxane) and their chemical derivatives journal May 1991
Fabrication of three-dimensional polymer photonic crystal structures using single diffraction element interference lithography journal March 2003
On-chip natural assembly of silicon photonic bandgap crystals journal November 2001
Fabricating Semiconductor Nano/Microwires and Transfer Printing Ordered Arrays of Them onto Plastic Substrates journal October 2004
Field emission from carbon nanotubes for displays journal April 2000
Integration of Organic FETs With Organic Photodiodes for a Large Area, Flexible, and Lightweight Sheet Image Scanners journal November 2005
Mesoscopic self‐assembly of gold islands on diblock‐copolymer films journal January 1994
Synthesis of individual single-walled carbon nanotubes on patterned silicon wafers journal October 1998
Patterning Self-Assembled Monolayers: Applications in Materials Science journal May 1994
An experimental study of the source/drain parasitic resistance effects in amorphous silicon thin film transistors journal July 1992
Oxidation Resistant Germanium Nanowires: Bulk Synthesis, Long Chain Alkanethiol Functionalization, and Langmuir−Blodgett Assembly journal August 2005
Photonic Band Gaps Based on Tetragonal Lattices of Slanted Pores journal June 2003
Ballistic carbon nanotube field-effect transistors journal August 2003
Process for fabricating organic semiconductor device involving selective patterning patent June 2002
Multispectral Plasmonic Crystal Sensors patent-application September 2008
The Adhesion Between Polymers journal August 1991
Release Strategies For Making Transferable Semiconductor Structures, Devices And Device Components patent-application May 2008
Field-Effect Mobility of Organic Polymer Thin-Film Transistors journal October 2004
Electrospinning of Nanofibers: Reinventing the Wheel? journal July 2004
Ordering of Spontaneously Formed Buckles on Planar Surfaces journal April 2000
Patterning organic–inorganic thin-film transistors using microcontact printed templates journal November 2001
Transfer printing by kinetic control of adhesion to an elastomeric stamp journal December 2005
Small-Angle Neutron Scattering from Surfactant-Assisted Aqueous Dispersions of Carbon Nanotubes
  • Yurekli, Koray; Mitchell, Cynthia A.; Krishnamoorti, Ramanan
  • Journal of the American Chemical Society, Vol. 126, Issue 32, p. 9902-9903 https://doi.org/10.1021/ja047451u
journal August 2004
Methods of positioning and/or orienting nanostructures patent March 2005
Mold release layer transferring film and laminate film patent August 2007
Nanowire Arrays Defined by Nanoimprint Lithography journal April 2004
Large Area Submicrometer Contact Printing Using a Contact Aligner journal June 2000
The mechanics of electronic materials journal September 1999
Large area solar cell extended life interconnect patent November 2000
An improved GaAs device model for the simulation of analog integrated circuit journal May 2003
Nanowire heterostructures for encoding information patent-application February 2004
An analytical back-gate bias effect model for ultrathin SOI CMOS devices journal April 1993
Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics patent July 2012
Nanoimprint lithography patent June 1998
Chemical Etching of InGaAsP/InP DH Wafer journal January 1982
Cheap and cheerful circuits journal September 2000
InGaN nanorings and nanodots by selective area epitaxy journal October 2005
Creating Periodic Three-Dimensional Structures by Multibeam Interference of Visible Laser journal June 2002
Nanostructured advanced materials. Perspectives and directions journal January 2002
Plastic Electronics and Their Packaging Technologies journal April 2003
An elastomeric conductor based on polyaniline prepared by mechanical mixing journal September 1999
Macroelectronics: Perspectives on Technology and Applications journal July 2005
A Laser Ablation Method for the Synthesis of Crystalline Semiconductor Nanowires journal January 1998
Printing Patterns of Proteins journal April 1998
Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates journal July 2003
Low-voltage organic transistors with an amorphous molecular gate dielectric journal October 2004
Study of Mesa Undercuts Produced in GaAs with H3PO4-Based Etchants journal January 1989
Amorphous Si TFTs on plastically deformed spherical domes journal April 2002
Bulk Quantities of Single-Crystal Silicon Micro-/Nanoribbons Generated from Bulk Wafers journal October 2006
Method of making thin silicon sheets for solar cells patent January 2007
Screen printing for the fabrication of organic light-emitting devices journal January 2001
Field Configured Assembly: Programmed Manipulation and Self-assembly at the Mesoscale journal May 2004
Nanobelts of Semiconducting Oxides journal March 2001
Silicon motherboards for multichannel optical modules
  • Ambrosy, A.; Richter, H.; Hehmann, J.
  • IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part A, Vol. 19, Issue 1, p. 34-40 https://doi.org/10.1109/95.486559
journal March 1996
Preparation of Macroporous Metal Films from Colloidal Crystals journal September 1999
Microscopic patterning of orientated mesoscopic silica through guided growth journal December 1997
Directed Assembly of One-Dimensional Nanostructures into Functional Networks journal January 2001
Mesoscale organization of metal nanocrystals journal January 2002
High Performance Electrolyte Gated Carbon Nanotube Transistors journal August 2002
Novel Nanostructures of Functional Oxides Synthesized by Thermal Evaporation journal January 2003
Low-voltage and high-field-effect mobility organic transistors with a polymer insulator journal February 2006
Invention of the integrated circuit journal July 1976
Herringbone Buckling Patterns of Compressed Thin Films on Compliant Substrates journal November 2004
Single-Crystal Nanorings Formed by Epitaxial Self-Coiling of Polar Nanobelts journal February 2004
Method of fabricating micron-and submicron-scale elastomeric templates for surface patterning patent-application January 2003
Variation in the effective richardson constant of metal—GaAs and Metal—InP contacts due to the effect of processing parameters journal November 1993
Web fabrication of devices patent January 2004
Introduction to Organic Thin Film Transistors and Design of n-Channel Organic Semiconductors journal August 2004
High-performance all-polymer integrated circuits journal September 2000
Thin-Film Transistors book February 2003
Carbon Structures with Three-Dimensional Periodicity at Optical Wavelengths journal October 1998
A Printable Form of Single-Crystalline Gallium Nitride for Flexible Optoelectronic Systems journal October 2005
Using printing and molding techniques to produce distributed feedback and Bragg reflector resonators for plastic lasers journal September 1998
Printable Semiconductor Structures and Related Methods of Making and Assembling patent-application November 2010
The Effectiveness of Silane Adhesion Promoters in the Performance of Polyurethane Adhesives journal July 1998
Functional Pixel Circuits for Elastic AMOLED Displays journal July 2005
Free-standing and vertically aligned InP nanowires grown by metalorganic vapor phase epitaxy journal March 2004
Low-Temperature Deposition of Hydrogenated Amorphous Silicon in an Electron Cyclotron Resonance Reactor for Flexible Displays journal July 2005
Contact Electrification and Adhesion Between Dissimilar Materials journal April 1992
High-Luminosity Blue and Blue-Green Gallium Nitride Light-Emitting Diodes journal January 1995
Engineering Carbon Nanotubes and Nanotube Circuits Using Electrical Breakdown journal April 2001
Finer features for functional microdevices journal August 2001
Band Gap Fluorescence from Individual Single-Walled Carbon Nanotubes journal July 2002
Anodization and Microcontact Printing on Electroless Silver: Solution-Based Fabrication Procedures for Low-Voltage Electronic Systems with Organic Active Components journal July 2000
Nanocomposites patent-application May 2004
Manufacturing method for electric device patent-application April 2004
Self-Assembly of Mesoscale Objects into Ordered Two-Dimensional Arrays journal April 1997
Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species journal August 2001
Organic Nanodielectrics for Low Voltage Carbon Nanotube Thin Film Transistors and Complementary Logic Gates journal October 2005
Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane) journal October 1998
Deformable organic devices patent-application October 2005
Large-Area, Selective Transfer of Microstructured Silicon: A Printing- Based Approach to High-Performance Thin-Film Transistors Supported on Flexible Substrates journal October 2005
Universal description of channel conductivity for nanotube and nanowire transistors journal August 2003
Patterned Luminescence of Organic Light-Emitting Diodes by Hot Microcontact Printing (HμCP) of Self-Assembled Monolayers journal November 2000
Semiconductor nanowires for novel one-dimensional devices journal March 2004
Surface mountable flexible interconnect patent July 1999
The Incredible Shrinking Circuit journal September 2001
Semiconductor Clusters, Nanocrystals, and Quantum Dots journal February 1996
Optical Systems Fabricated by Printing-based Assembly patent-application November 2010
Apparatus relating to block configurations and fluidic self-assembly processes patent December 2003
Synthetic Chemistry for Ultrapure, Processable, and High-Mobility Organic Transistor Semiconductors journal March 2001
Oriented nanostructures and methods of preparing patent-application July 2004
High-Resolution Contact Printing with Dendrimers journal April 2002
Amorphous silicon technology for large area digital X-ray and optical imaging journal April 2002
Some properties of spherical and rod-shaped semiconductor and metal nanocrystals journal January 2002
Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks journal August 2004
Biological applications of high aspect ratio nanoparticles journal January 2004
Preparation of Metallic Films on Elastomeric Stamps and Their Application for Contact Processing and Contact Printing journal February 2003
InGaAs metal-semiconductor-metal photodetectors for long wavelength optical communications journal March 1991
Fluidic self-assembly for the integration of GaAs light-emitting diodes on Si substrates journal June 1994
Composite patterning devices for soft lithography patent March 2007
Selective wet-etching of microcontact-printed Cu substrates with control over the etch profile journal June 2003
Contact bonding, including direct-bonding in a historical and recent context of materials science and technology, physics and chemistry journal April 2002
Mechanics of rollable and foldable film-on-foil electronics journal February 1999
Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM journal December 2000
Unconventional Methods for Fabricating and Patterning Nanostructures journal May 1999
Conversion of Zinc Oxide Nanobelts into Superlattice-Structured Nanohelices journal September 2005
Magnetic trapping and self-assembly of multicomponent nanowires journal May 2002
Nanotransfer printing of organic and carbon nanotube thin-film transistors on plastic substrates journal April 2005
Molecule-Mimetic Chemistry and Mesoscale Self-Assembly journal December 2000

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