Test surfaces useful for calibration of surface profilometers
Patent
·
OSTI ID:1113535
The present invention provides for test surfaces and methods for calibration of surface profilometers, including interferometric and atomic force microscopes. Calibration is performed using a specially designed test surface, or the Binary Pseudo-random (BPR) grating (array). Utilizing the BPR grating (array) to measure the power spectral density (PSD) spectrum, the profilometer is calibrated by determining the instrumental modulation transfer.
- Research Organization:
- Brookhaven National Laboratory (BNL), Upton, NY (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC02-05CH11231; AC02-98CH10886
- Assignee:
- The Regents of the University of California (Oakland, CA); Brookhaven Science Associates, LLC (Upton, NY)
- Patent Number(s):
- 8,616,044
- Application Number:
- 12/408,508
- OSTI ID:
- 1113535
- Country of Publication:
- United States
- Language:
- English
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|
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|
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