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Title: Thermal decomposition of tetramethyl orthosilicate in the gas phase: An experimental and theoretical study of the initiation process

Journal Article · · Journal of Physical Chemistry; (United States)
DOI:https://doi.org/10.1021/j100002a034· OSTI ID:6605215
; ;  [1];  [2]
  1. Emory Univ., Atlanta, GA (United States)
  2. Sandia National Lab., Livermore, CA (United States)

The thermal decomposition of Si(OCH[sub 3])[sub 4] (TMOS) has been studied by FTIR at temperatures between 858 and 968 K. The experiment was carried out in a static cell at a constant pressure of 700 Torr under highly diluted conditions. Additional experiments were performed by using toluene as a radical scavenger. The species monitored included TMOS, CH[sub 2]O, CH[sub 4], and CO. According to these measurements, the first-order global rate constants for the disappearance of TMOS without and with toluene can be given by k[sub g] = 1.4 x 10[sup 16] exp(-81 200/RT) s[sup [minus]1] and k[sub g] = 2.0 x 10[sup 14] exp(-74 500/RT) s[sup [minus]1], respectively. The noticeable difference between the two sets of Arrhenius parameters suggests that, in the absence of the inhibitor, the reactant was consumed to a significant extent by radical attacks at higher temperatures. The experimental data were kinetically modeled with the aid of a quantum-chemical calculation using the BAC-MP4 method. The results of the kinetic modeling, using the mechanism constructed on the basis of the quantum-chemical data and the known C/H/O chemistry, identified two rate-controlling reactions whose first-order rate constants are given here. 22 refs., 15 figs., 3 tabs.

OSTI ID:
6605215
Journal Information:
Journal of Physical Chemistry; (United States), Vol. 99:2; ISSN 0022-3654
Country of Publication:
United States
Language:
English

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