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Title: Low-energy ion induced Auger electron spectra and energy thresholds for some pure elements, compounds, and alloys

Journal Article · · J. Vac. Sci. Technol., A; (United States)
DOI:https://doi.org/10.1116/1.574641· OSTI ID:6512404

By improvements of experimental method, ion induced Auger electron spectra (IAES) of pure elements, compounds, and alloys for 23 samples have been obtained successfully using a combined scanning Auger microscopy/secondary ion mass spectrometry instrument. Ar/sup +/ with energy up to 5 keV was the incident ion. The spectra measured are different from that obtained by electron-stimulated Auger, and correspondent Auger electron energies are not more than 500 eV. With increasing atomic number, the intensity of IAES peaks decreases. Some spectra of those samples and energy thresholds of all samples are given here. Many of them are not found yet in publications. The results showed that energy threshold values of elements go up with increasing atomic number and level off in the region of the fourth- and fifth-period elements. Among others, the thresholds of Mg, Al, and Si are 200, 350, and 600 eV, respectively, and much lower than the values reported before.

Research Organization:
Lanzhou Institute of Physics, P. O. Box 94, Lanzhou, People's Republic of China
OSTI ID:
6512404
Journal Information:
J. Vac. Sci. Technol., A; (United States), Vol. 5:4
Country of Publication:
United States
Language:
English