X-ray absorption spectroscopy and atomic force microscopy study of bias-enhanced nucleation of diamond films

Journal Article · Wed Apr 01 00:00:00 EST 1998 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.121290· OSTI ID:627725

Garcia, M M; Jimenez, I; Vazquez, L; Gomez-Aleixandre, C; Albella, J M; Sanchez, O ^[1]; Terminello, L J ^[2]; Himpsel, F J ^[3]

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1. Instituto de Ciencia de Materiales, C.S.I.C., Cantoblanco28049, Madrid (Spain)
2. Lawrence Livermore National Laboratory, Livermore, California94551 (United States)
3. Department of Physics, University of Wisconsin--Madison, Madison, Wisconsin53706 (United States)

The bias-enhanced nucleation of diamond on Si(100) has been studied by x-ray absorption near-edge spectroscopy (XANES) and atomic force microscopy, two techniques well suited to characterize nanometric crystallites. Diamond nuclei of {approximately}15nm are formed after 5 min of bias-enhanced treatment. The number of nuclei and its size increases with the time of application of the bias voltage. A nanocrystalline diamond film is attained after 20 min of bias-enhanced nucleation. At the initial nucleation stages, the Si substrate appears covered with diamond crystallites and graphite, without SiC being detected by XANES. {copyright} {ital 1998 American Institute of Physics.}

• OSTI ID: 627725
• Journal Information: Applied Physics Letters, Vol. 72, Issue 17; Other Information: PBD: Apr 1998
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
DIAMONDS
X-RAY SPECTROSCOPY
ABSORPTION SPECTROSCOPY
NUCLEATION
THIN FILMS
GRAIN SIZE
MICROSCOPY