Crystallization of ultrathin W-Si multilayer structures by high-energy heavy ion irradiations

Journal Article · Mon Oct 22 00:00:00 EDT 1990 · Applied Physics Letters; (USA)

DOI:https://doi.org/10.1063/1.104052· OSTI ID:6085767

Marfaing, J; Marine, W ^[1]; Vidal, B ^[2]; Toulemonde, M ^[3]; Hage Ali, M; Stoquert, J P ^[4]

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1. URA CNRS 783, Faculte des Sciences de Luminy, Departement de Physique, Case 901-13 288 Marseille Cedex 9 (France)
2. URA CNRS 843, Faculte des Sciences de St. Jerome, Case 141-13397 Marseille Cedex 13 (France)
3. CIRIL, Rue Claude Bloch, BP 5133-14040 Caen Cedex (France)
4. CRN Groupe Phase-67037 Strasbourg Cedex (France)

Ultrathin amorphous multilayers structures (1.55 nm bilayer period) were irradiated by high-energy heavy ion ({sup 127}I and {sup 238}U ions). Transmission electron microscopy study shows that the ion-material interaction in such a configuration leads to an irreversible transformation of the initial amorphous structures. In this letter, we report the first observation of the crystallization of the multilayers induced by the heavy ion irradiations with a subsequent formation of a new WSi structure. The crucial role of the electronic effects in the crystallization process is discussed relatively to the other phenomena induced under the ion irradiation.

• OSTI ID: 6085767
• Journal Information: Applied Physics Letters; (USA), Vol. 57:17; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
SILICON
PHYSICAL RADIATION EFFECTS
TUNGSTEN
AMORPHOUS STATE
CRYSTALLIZATION
IODINE 127
IODINE IONS
LAYERS
PHASE TRANSFORMATIONS
SILICON ALLOYS
THIN FILMS
TRANSMISSION ELECTRON MICROSCOPY
TUNGSTEN ALLOYS
TUNGSTEN SILICIDES
URANIUM 238
URANIUM IONS
ACTINIDE ISOTOPES
ACTINIDE NUCLEI
ALLOYS
ALPHA DECAY RADIOISOTOPES
CHARGED PARTICLES
ELECTRON MICROSCOPY
ELEMENTS
EVEN-EVEN NUCLEI
FILMS
HEAVY NUCLEI
INTERMEDIATE MASS NUCLEI
IODINE ISOTOPES
IONS
ISOTOPES
METALS
MICROSCOPY
NUCLEI
ODD-EVEN NUCLEI
RADIATION EFFECTS
RADIOISOTOPES
REFRACTORY METAL COMPOUNDS
SEMIMETALS
SILICIDES
SILICON COMPOUNDS
STABLE ISOTOPES
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
TUNGSTEN COMPOUNDS
URANIUM ISOTOPES
YEARS LIVING RADIOISOTOPES
360106* - Metals & Alloys- Radiation Effects