Hardness, elastic modulus, and wear resistance of hafnium oxide-based films grown by atomic layer deposition
- Department of Materials Science and Engineering, Aalto University, 02150 Espoo (Finland)
- Laboratorio MDM, IMM CNR, Via C. Olivetti 2, 20864 Agrate Brianza (MB) (Italy)
- Laboratorio MDM, IMM CNR, Via C. Olivetti 2, 20864 Agrate Brianza (MB), Italy and Dipartimento di Scienza dei Materiali, Università degli studi di Milano Bicocca, 20126 Milano (Italy)
The investigation of mechanical properties of atomic layer deposition HfO{sub 2} films is important for implementing these layers in microdevices. The mechanical properties of films change as a function of composition and structure, which accordingly vary with deposition temperature and post-annealing. This work describes elastic modulus, hardness, and wear resistance of as-grown and annealed HfO{sub 2}. From nanoindentation measurements, the elastic modulus and hardness remained relatively stable in the range of 163–165 GPa and 8.3–9.7 GPa as a function of deposition temperature. The annealing of HfO{sub 2} caused significant increase in hardness up to 14.4 GPa due to film crystallization and densification. The structural change also caused increase in the elastic modulus up to 197 GPa. Wear resistance did not change as a function of deposition temperature, but improved upon annealing.
- OSTI ID:
- 22592846
- Journal Information:
- Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films, Vol. 34, Issue 5; Other Information: (c) 2016 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 0734-2101
- Country of Publication:
- United States
- Language:
- English
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