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Title: Low pressure hand made PVD system for high crystalline metal thin film preparation in micro-nanometer scale

High crystalline metal thin film preparation in application both for catalyst substrate or electrode in any electronic devices always to be considered in material functional material research and development. As a substrate catalyst, this metal take a role as guidance for material growth in order to resulted in proper surface structure although at the end it will be removed via etching process. Meanwhile as electrodes, it will dragging charges to be collected inside. This brief discussion will elaborate general fundamental principle of physical vapor deposition (PVD) system for metal thin film preparation in micro-nanometer scale. The influence of thermodynamic parameters and metal characteristic such as melting point and particle size will be elucidated. Physical description of deposition process in the chamber can be simplified by schematic evaporation phenomena which is supported by experimental measurement such as SEM and XRD.
Authors:
; ; ; ;  [1]
  1. Department of physics, physics of electronic materials research division Faculty of Mathematics and Natural Sciences, Institut Teknologi Bandung Jl. Ganesha 10, Bandung 40132, Jawa Barat – Indonesia (Indonesia)
Publication Date:
OSTI Identifier:
22494615
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1710; Journal Issue: 1; Conference: NNS2015: 6. nanoscience and nanotechnology symposium, Surakarta (Indonesia), 4-5 Nov 2015; Other Information: (c) 2016 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; CATALYSTS; ELECTRODES; ELECTRONIC EQUIPMENT; ETCHING; EVAPORATION; MELTING POINTS; METALS; PARTICLE SIZE; PHYSICAL VAPOR DEPOSITION; SUBSTRATES; SURFACES; THIN FILMS; X-RAY DIFFRACTION