Study and characterization of the irreversible transformation of electrically stressed planar Ti/TiO{sub x}/Ti junctions

Journal Article · Wed Oct 14 00:00:00 EDT 2015 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4932646· OSTI ID:22492806

Guillaume, N.; Le Berre, M.; Albertini, D.; Baboux, N.; Chevalier, C.; Ayadi, K.; Grégoire, J.; Gautier, B.; Calmon, F. ^[1]

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1. Institut des Nanotechnologies de Lyon, Université de Lyon, INL UMR 5270, CNRS, INSA de Lyon, Villeurbanne F-69621 (France)

We investigate the properties and characteristics of planar Ti/TiO{sub x}/Ti junctions, which consist of transverse TiO{sub x} lines drawn on Ti test patterns. Junctions are elaborated by means of local anodic oxidation using atomic force microscopy. An irreversible morphological transformation occurring in a reproducible manner is observed when these planar junctions are electrically stressed under ambient atmosphere. Structural and chemical analyses based on transmission electron microscopy techniques reveal the extension of the initial amorphous TiO{sub x} into a crystalline rutile phase. This irreversible transformation is proven to vanish completely if the electrical stress occurs under vacuum atmosphere. Finally, we carry out temperature dependent electrical measurements in order to elucidate their conduction mechanism: Schottky emission above an ultra-low potential barrier is assumed to dominate under vacuum atmosphere whereas ionic conduction seems to prevail in air.

• OSTI ID: 22492806
• Journal Information: Journal of Applied Physics, Vol. 118, Issue 14; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ATOMIC FORCE MICROSCOPY
CHEMICAL ANALYSIS
EMISSION
MIM JUNCTIONS
OXIDATION
POTENTIALS
RUTILE
STRESSES
TEMPERATURE DEPENDENCE
TITANIUM OXIDES
TRANSMISSION ELECTRON MICROSCOPY