Novel chemoresistive CH{sub 4} sensor with 10 ppm sensitivity based on multiwalled carbon nanotubes functionalized with SnO{sub 2} nanocrystals
- Department of Electrical and Computer Engineering, University of Illinois, Chicago, Illinois 60607 (United States)
- Center for Nanoscale Materials, Argonne National Laboratory, Lemont, Illinois 60439 (United States)
- Lawrence Berkeley National Laboratory, Berkeley, California 94720 (United States)
- U.S. Environmental Protection Agency, Las Vegas, Nevada 89199 (United States)
Chemoresistive sensors based on multiwalled carbon nanotubes (MWCNTs) functionalized with SnO{sub 2} nanocrystals (NCs) have great potential for detecting trace gases at low concentrations (single ppm levels) at room temperature, because the SnO{sub 2} nanocrystals act as active sites for the chemisorption of gas molecules, and carbon nanotubes (CNTs) act as an excellent current carrying platform, allowing the adsorption of gas on SnO{sub 2} to modulate the resistance of the CNTs. However, uniform conjugation of SnO{sub 2} NCs with MWCNTs is challenging. An effective atomic layer deposition based approach to functionalize the surface of MWCNTs with SnO{sub 2} NCs, resulting in a novel CH{sub 4} sensor with 10 ppm sensitivity, is presented in this paper. Scanning electron microscopy, transmission electron microscopy (TEM), energy dispersive x-ray spectroscopy, and Raman spectroscopy were implemented to study the morphology, elemental composition, and the crystal quality of SnO{sub 2} functionalized MWCNTs. High resolution TEM images showed that the crystal quality of the functionalizing SnO{sub 2} NCs was of high quality with clear lattice fringes and the dimension almost three times smaller than shown thus far in literature. A lift-off based photolithography technique comprising bilayer photoresists was optimized to fabricate SnO{sub 2} functionalized MWCNTs-based chemoresistor sensor, which at room temperature can reliably sense below 10 ppm of CH{sub 4} in air. Such low level gas sensitivity, with significant reversible relative resistance change, is believed to be the direct result of the successful functionalization of the MWCNT surface by SnO{sub 2} NCs.
- OSTI ID:
- 22489764
- Journal Information:
- Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films, Vol. 34, Issue 1; Other Information: (c) 2015 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 0734-2101
- Country of Publication:
- United States
- Language:
- English
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journal | January 2020 |
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