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Title: Influence of substrate temperature on structural and optical properties of RF sputtered ZnMnO thin films

The ZnMnO thin films were deposited on glass substrates by radio frequency magnetron sputtering method. The properties of ZnMnO thin films were investigated by high-resolution x-ray diffractometer (HRXRD),atomic force microscopy (AFM), UV-Vis spectrometer and room temperature photoluminescence (PL), under the influence of substrate temperature. The substrate temperature was varied from 300, 400 and 500°C. With increasing the substrate temperature, the structure of the films changed from cubic to hexagonal. The cubic ZnMnO thin films grown along [210] direction, while the hexagonal ones grown along [002] direction. The changes in surface morphology provided a proof on the structural transition. Also, decrease and increase of optical band gap is associated with cubic or hexagonal structure of the films.
Authors:
; ; ; ; ;  [1]
  1. Gazi University, Photonics Application and Research Center (Turkey)
Publication Date:
OSTI Identifier:
22469898
Resource Type:
Journal Article
Resource Relation:
Journal Name: Semiconductors; Journal Volume: 49; Journal Issue: 6; Other Information: Copyright (c) 2015 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ATOMIC FORCE MICROSCOPY; CUBIC LATTICES; GLASS; HEXAGONAL LATTICES; MANGANESE OXIDES; MORPHOLOGY; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; RADIOWAVE RADIATION; RESOLUTION; SPUTTERING; SUBSTRATES; SURFACES; TEMPERATURE DEPENDENCE; THIN FILMS; X-RAY DIFFRACTION; ZINC COMPOUNDS