Characterization of surface modification in atomic force microscope-induced nanolithography of oxygen deficient La{sub 0.67}Ba{sub 0.33}MnO{sub 3−δ} thin films
- Department of Physics, Astronomy and Geosciences, Towson University, Towson MD 21043 (United States)
- Laboratory for Physical Sciences, 8050 Greenmead Drive, College Park, MD 20740, U.S.A (United States)
We report our studies of the nanolithographic surface modifications induced by an Atomic Force Microscope (AFM) in epitaxial thin films of oxygen deficient Lanthanum Barium Manganese Oxide (La{sub 0.67}Ba{sub 0.33}MnO{sub 3−δ}). The pattern characteristics depend on the tip voltage, tip polarity, voltage duration, tip force, and humidity. We have used Electron Energy Dispersive X-Ray Spectroscopy (EDS) to analyze the chemical changes associated with the surface modifications produced with a negatively biased AFM tip. A significant increase in the oxygen stoichiometry for the patterned regions relative to the pristine film surface is observed. The results also indicate changes in the cation stoichiometry, specifically a decrease in the Lanthanum and Manganese concentrations and an increase in the Barium concentration in the patterned regions.
- OSTI ID:
- 22420208
- Journal Information:
- AIP Advances, Vol. 4, Issue 12; Other Information: (c) 2014 Author(s); Country of input: International Atomic Energy Agency (IAEA); ISSN 2158-3226
- Country of Publication:
- United States
- Language:
- English
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