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Title: Effect of different carrier gases and their flow rates on the growth of carbon nanotubes

The present paper examines the effect of different carrier gases and their flow rates on the growth of carbon nanotubes (CNTs). A theoretical model is developed incorporating the charging rate of the carbon nanotube, kinetics of all the plasma species, and the growth rate of the CNTs because of diffusion and accretion of ions on the catalyst nanoparticle. The three different carrier gases, i.e., argon (Ar), ammonia, and nitrogen, are considered in the present investigation, and flow rates of all the three carrier gases are varied individually (keeping the flow rates of hydrocarbon and hydrogen gas constant) to investigate the variations in the number densities of hydrocarbon and hydrogen ions in the plasma and their consequent effects on the height and radius of CNT. Based on the results obtained, it is concluded that Ar favors the formation of CNTs with larger height and radius whereas ammonia contributes to better height of CNT but decreases the radius of CNT, and nitrogen impedes both the height and radius of CNT. The present work can serve to the better understanding of process parameters during growth of CNTs by a plasma enhanced chemical vapor deposition process.
Authors:
;  [1]
  1. Department of Applied Physics, Delhi Technological University (DTU), Shahbad Daulatpur, Bawana Road, Delhi 110 042 (India)
Publication Date:
OSTI Identifier:
22408362
Resource Type:
Journal Article
Resource Relation:
Journal Name: Physics of Plasmas; Journal Volume: 22; Journal Issue: 4; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; AMMONIA; ARGON; CARBON NANOTUBES; CARRIERS; CHEMICAL VAPOR DEPOSITION; CRYSTAL GROWTH; DENSITY; DIFFUSION; FLOW RATE; HYDROCARBONS; HYDROGEN IONS; KINETICS; NITROGEN; PLASMA