The method for measuring the groove density of variable-line-space gratings with elimination of the eccentricity effect
Journal Article
·
· Review of Scientific Instruments
- National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei (China)
To eliminate the eccentricity effect, a new method for measuring the groove density of a variable-line-space grating was adapted. Based on grating equation, groove density is calculated by measuring the internal angles between zeroth-order and first-order diffracted light for two different wavelengths with the same angle of incidence. The measurement system mainly includes two laser sources, a phase plate, plane mirror, and charge coupled device. The measurement results of a variable-line-space grating demonstrate that the experiment data agree well with theoretical values, and the value of measurement error (ΔN/N) is less than 2.72 × 10{sup −4}.
- OSTI ID:
- 22392350
- Journal Information:
- Review of Scientific Instruments, Vol. 86, Issue 2; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
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