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Title: The method for measuring the groove density of variable-line-space gratings with elimination of the eccentricity effect

To eliminate the eccentricity effect, a new method for measuring the groove density of a variable-line-space grating was adapted. Based on grating equation, groove density is calculated by measuring the internal angles between zeroth-order and first-order diffracted light for two different wavelengths with the same angle of incidence. The measurement system mainly includes two laser sources, a phase plate, plane mirror, and charge coupled device. The measurement results of a variable-line-space grating demonstrate that the experiment data agree well with theoretical values, and the value of measurement error (ΔN/N) is less than 2.72 × 10{sup −4}.
Authors:
; ; ; ; ;  [1]
  1. National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei (China)
Publication Date:
OSTI Identifier:
22392350
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 86; Journal Issue: 2; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; CHARGE-COUPLED DEVICES; DENSITY; ERRORS; GRATINGS; INCIDENCE ANGLE; LASERS; MIRRORS; PLATES; WAVELENGTHS