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Title: High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient

AlN and AlScN thin films with 27% scandium (Sc) were synthesized by DC magnetron sputtering deposition and used to fabricate surface acoustic wave (SAW) devices. Compared with AlN-based devices, the AlScN SAW devices exhibit much better transmission properties. Scandium doping results in electromechanical coupling coefficient, K{sup 2}, in the range of 2.0% ∼ 2.2% for a wide normalized thickness range, more than a 300% increase compared to that of AlN-based SAW devices, thus demonstrating the potential applications of AlScN in high frequency resonators, sensors, and high efficiency energy harvesting devices. The coupling coefficients of the present AlScN based SAW devices are much higher than that of the theoretical calculation based on some assumptions for AlScN piezoelectric material properties, implying there is a need for in-depth investigations on the material properties of AlScN.
Authors:
; ; ;  [1] ; ; ; ;  [2] ;  [3] ;  [4]
  1. Department of Information Science and Electronic Engineering, Zhejiang University and Cyrus Tang Centre for Sensor Materials and Applications, 38 Zheda Road, Hangzhou 310027 (China)
  2. Institute of Sensor and Actuator Systems, Vienna University of Technology, Floragasse, 7/2/366-MST, A-1040 Vienna (Austria)
  3. Institute of Renewable Energy Environmental Technology, University of Bolton, Deane Road, Bolton BL3 5AB (United Kingdom)
  4. (China)
Publication Date:
OSTI Identifier:
22350823
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 105; Journal Issue: 13; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ALUMINIUM NITRIDES; COUPLING; DEPOSITION; EFFICIENCY; MAGNETRONS; PIEZOELECTRICITY; SCANDIUM; SCANDIUM COMPOUNDS; SENSORS; SOUND WAVES; SPUTTERING; SURFACE PROPERTIES; SURFACES; THICKNESS; THIN FILMS; TRANSMISSION