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Title: Electroplated L1{sub 0} CoPt thick-film permanent magnets

The fabrication and magnetic characterization of 15-μm-thick electroplated L1{sub 0} CoPt hard magnets with good magnetic properties is reported in this paper. Experimental study of the dependence of the magnets' properties on annealing temperature reveals that an intrinsic coercivity H{sub ci} = ∼800 kA/m (10 kOe), squareness >0.8, and energy product of >150 kJ/m{sup 3} are obtained for photolithographically patterned structures (250 μm × 2 mm stripes; 15 μm thickness) electroplated on silicon substrates and annealed in hydrogen forming gas at 700 °C. Scanning electron microscopy is used to inspect the morphology of both the as-deposited and annealed magnetic layers, and X-ray Diffractometer analysis on the magnets annealed at 700 °C confirm a phase transformation to an ordered L1{sub 0} CoPt structure, with a minor phase of hcp Co. These thick films are intended for microsystems/MEMS applications.
Authors:
; ;  [1]
  1. Department of Electrical and Computer Engineering, Interdisciplinary Microsystems Group, University of Florida, Gainesville, Florida 32611 (United States)
Publication Date:
OSTI Identifier:
22273788
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 115; Journal Issue: 17; Conference: 55. annual conference on magnetism and magnetic materials, Atlanta, GA (United States), 14-18 Nov 2010; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ANNEALING; COBALT; COERCIVE FORCE; FILMS; HCP LATTICES; HYDROGEN; INTERMETALLIC COMPOUNDS; LAYERS; MAGNETIC PROPERTIES; MICROSTRUCTURE; MORPHOLOGY; PERMANENT MAGNETS; PHASE TRANSFORMATIONS; PLATINUM; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES; X-RAY DIFFRACTION