Electroplated L1{sub 0} CoPt thick-film permanent magnets

Journal Article · Wed May 07 00:00:00 EDT 2014 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4867119· OSTI ID:22273788

Qi, Bin; Arnold, David P. ^[1]

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1. Department of Electrical and Computer Engineering, Interdisciplinary Microsystems Group, University of Florida, Gainesville, Florida 32611 (United States)

The fabrication and magnetic characterization of 15-μm-thick electroplated L1{sub 0} CoPt hard magnets with good magnetic properties is reported in this paper. Experimental study of the dependence of the magnets' properties on annealing temperature reveals that an intrinsic coercivity H{sub ci} = ∼800 kA/m (10 kOe), squareness >0.8, and energy product of >150 kJ/m{sup 3} are obtained for photolithographically patterned structures (250 μm × 2 mm stripes; 15 μm thickness) electroplated on silicon substrates and annealed in hydrogen forming gas at 700 °C. Scanning electron microscopy is used to inspect the morphology of both the as-deposited and annealed magnetic layers, and X-ray Diffractometer analysis on the magnets annealed at 700 °C confirm a phase transformation to an ordered L1{sub 0} CoPt structure, with a minor phase of hcp Co. These thick films are intended for microsystems/MEMS applications.

• OSTI ID: 22273788
• Journal Information: Journal of Applied Physics, Vol. 115, Issue 17; Conference: 55. annual conference on magnetism and magnetic materials, Atlanta, GA (United States), 14-18 Nov 2010; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ANNEALING
COBALT
COERCIVE FORCE
FILMS
HCP LATTICES
HYDROGEN
INTERMETALLIC COMPOUNDS
LAYERS
MAGNETIC PROPERTIES
MICROSTRUCTURE
MORPHOLOGY
PERMANENT MAGNETS
PHASE TRANSFORMATIONS
PLATINUM
SCANNING ELECTRON MICROSCOPY
SILICON
SUBSTRATES
X-RAY DIFFRACTION