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Title: Direct periodic patterning of GaN-based light-emitting diodes by three-beam interference laser ablation

We report on the direct patterning of two-dimensional periodic structures in GaN-based light-emitting diodes (LEDs) through laser interference ablation for the fast and reliable fabrication of periodic micro- and nano-structures aimed at enhancing light output. Holes arranged in a two-dimensional hexagonal lattice array having an opening size of 500 nm, depth of 50 nm, and a periodicity of 1 μm were directly formed by three-beam laser interference without photolithography or electron-beam lithography processes. The laser-patterned LEDs exhibit an enhancement in light output power of 20% compared to conventional LEDs having a flat top surface without degradation of electrical and optical properties of the top p-GaN layer and the active region, respectively.
Authors:
; ;  [1] ; ;  [2] ;  [3] ;  [4] ;  [5] ;  [1] ;  [6] ;  [2] ;  [6] ;  [4] ;  [7]
  1. Center for Compound Semiconductors and School of Electrical and Computer Engineering, Georgia Institute of Technology, 777 Atlantic Dr. NW, Atlanta, Georgia 30332-0250 (United States)
  2. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332-0405 (United States)
  3. Suzhou Institute of Nano-tech and Nano-bionics, Chinese Academy of Sciences, Suzhou, Jiangsu 215125 (China)
  4. Materials Engineering Program, University of Houston, Houston, Texas 77204-4005 (United States)
  5. Department of Photonic Engineering, Chosun University, Seosuk-dong, Gwangju 501-759 (Korea, Republic of)
  6. (United States)
  7. (TcSUH), University of Houston, Houston, Texas 77204-4006 (United States)
Publication Date:
OSTI Identifier:
22261557
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 104; Journal Issue: 14; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ELECTRON BEAMS; GALLIUM NITRIDES; HEXAGONAL LATTICES; LASERS; LIGHT EMITTING DIODES; NANOSTRUCTURES; OPTICAL PROPERTIES; PERIODICITY