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Title: Structure in multilayer films of zinc sulfide and copper sulfide via atomic layer deposition

Multilayer film stacks of ZnS and Cu{sub x}S (x ∼ 2) were made via atomic layer deposition. The precursors were bis(2,2,6,6-tetramethyl-3,5-heptanedionato)zinc, bis(2,2,6,6-tetramethyl-3,5-heptanedionato)copper, and H{sub 2}S generated in situ for sulfur. Samples were deposited at 200 °C, in layers ranging from approximately 2 to 20 nm thick, based on binary growth rates. The properties of the film stacks were studied with atomic force microscopy, ultraviolet–visible spectroscopy, and extended x-ray absorption fine structure. The results demonstrate that the structure of films with the thinnest layers is dominated by Cu{sub x}S, whereas in the thicker films, the structure is determined by whichever material is first deposited. This can be attributed to the crystal structure mismatch of ZnS and Cu{sub x}S.
Authors:
; ; ; ; ; ;  [1]
  1. Department of Physics, University of California at Santa Cruz, 1156 High Street, Santa Cruz, California 95064 (United States)
Publication Date:
OSTI Identifier:
22258662
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films; Journal Volume: 32; Journal Issue: 1; Other Information: (c) 2014 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ABSORPTION; ABSORPTION SPECTROSCOPY; ATOMIC FORCE MICROSCOPY; COPPER; COPPER SULFIDES; FILMS; HYDROGEN SULFIDES; LAYERS; SULFUR; TEMPERATURE RANGE 0273-0400 K; X RADIATION; ZINC; ZINC SULFIDES