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Title: Design of a new electron cyclotron resonance ion source at Oshima National College of Maritime Technology

A new electron cyclotron resonance ion/plasma source has been designed and will be built at Oshima National College of Maritime Technology by early 2014. We have developed an ion source that allows the control of the plasma parameters over a wide range of electron temperatures for material research. A minimum-B magnetic field composed of axial mirror fields and radial cusp fields was designed using mainly Nd-Fe-B permanent magnets. The axial magnetic field can be varied by three solenoid coils. The apparatus has 2.45 GHz magnetron and 2.5–6.0 GHz solid-state microwave sources.
Authors:
; ; ; ; ; ;  [1] ;  [2] ;  [3]
  1. Oshima National College of Maritime Technology (OCMT), 1091-1 Komatsu, Suo-oshima, Yamaguchi 742-2193 (Japan)
  2. Tateyama Machine Co., Ltd., 30 Shimonoban, Toyama 930-1305 (Japan)
  3. Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871 (Japan)
Publication Date:
OSTI Identifier:
22253725
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 85; Journal Issue: 2; Conference: ICIS 2011: 14. international conference on ion sources, Giardini-Naxos, Sicily (Italy), 12-16 Sep 2011; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; CUSPED GEOMETRIES; ECR ION SOURCES; ELECTRON CYCLOTRON-RESONANCE; ELECTRON TEMPERATURE; MAGNETIC FIELDS; MAGNETRONS; MICROWAVE RADIATION; PERMANENT MAGNETS; PLASMA; SOLENOIDS