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Title: A versatile ultra high vacuum sample stage with six degrees of freedom

We describe the design and practical realization of a versatile sample stage with six degrees of freedom. The stage was designed for use in a Low Energy Electron Microscope, but its basic design features will be useful for numerous other applications. The degrees of freedom are X, Y, and Z, two tilts, and azimuth. All motions are actuated in an ultrahigh vacuum base pressure environment by piezoelectric transducers with integrated position sensors. The sample can be load-locked. During observation, the sample is held at a potential of −15 kV, at temperatures between room temperature and 1500 °C, and in background gas pressures up to 1 × 10{sup −4} Torr.
Authors:
;  [1]
  1. IBM T.J. Watson Research Center, 1101 Kitchawan Road, P.O. Box 218, Yorktown Heights, New York 10598 (United States)
Publication Date:
OSTI Identifier:
22220565
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 84; Journal Issue: 7; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; DEGREES OF FREEDOM; DESIGN; ELECTRON MICROSCOPES; PIEZOELECTRICITY; PRESSURE RANGE MICRO PA; SENSORS; SPACE DEPENDENCE; TRANSDUCERS