A versatile ultra high vacuum sample stage with six degrees of freedom

Journal Article · Mon Jul 15 00:00:00 EDT 2013 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.4813739· OSTI ID:22220565

Ellis, A. W.; Tromp, R. M. ^[1]

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1. IBM T.J. Watson Research Center, 1101 Kitchawan Road, P.O. Box 218, Yorktown Heights, New York 10598 (United States)

We describe the design and practical realization of a versatile sample stage with six degrees of freedom. The stage was designed for use in a Low Energy Electron Microscope, but its basic design features will be useful for numerous other applications. The degrees of freedom are X, Y, and Z, two tilts, and azimuth. All motions are actuated in an ultrahigh vacuum base pressure environment by piezoelectric transducers with integrated position sensors. The sample can be load-locked. During observation, the sample is held at a potential of −15 kV, at temperatures between room temperature and 1500 °C, and in background gas pressures up to 1 × 10{sup −4} Torr.

• OSTI ID: 22220565
• Journal Information: Review of Scientific Instruments, Vol. 84, Issue 7; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
DEGREES OF FREEDOM
DESIGN
ELECTRON MICROSCOPES
PIEZOELECTRICITY
PRESSURE RANGE MICRO PA
SENSORS
SPACE DEPENDENCE
TRANSDUCERS