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Title: An in-vacuum x-ray diffraction microscope for use in the 0.7-2.9 keV range

Journal Article · · Review of Scientific Instruments
DOI:https://doi.org/10.1063/1.3688655· OSTI ID:22072262
 [1];  [1];  [1]; ; ;  [1];  [1]; ; ; ;  [2];  [3]; ;  [1]; ; ; ;  [4]
  1. Australian Research Council Centre of Excellence for Coherent X-ray Science (Australia)
  2. Argonne National Laboratory, Argonne, Illinois 60439 (United States)
  3. Department of Physics, La Trobe University, Bundoora, Victoria 3086 (Australia)
  4. Xradia, Inc., 4385 Hopyard Road, Pleasanton, California 94588 (United States)

A dedicated in-vacuum coherent x-ray diffraction microscope was installed at the 2-ID-B beamline of the Advanced Photon Source for use with 0.7-2.9 keV x-rays. The instrument can accommodate three common implementations of diffractive imaging; plane wave illumination; defocused-probe (Fresnel diffractive imaging) and scanning (ptychography) using either a pinhole, focused or defocused probe. The microscope design includes active feedback to limit motion of the optics with respect to the sample. Upper bounds on the relative optics-to-sample displacement have been measured to be 5.8 nm(v) and 4.4 nm(h) rms/h using capacitance micrometry and 27 nm/h using x-ray point projection imaging. The stability of the measurement platform and in-vacuum operation allows for long exposure times, high signal-to-noise and large dynamic range two-dimensional intensity measurements to be acquired. Finally, we illustrate the microscope's stability with a recent experimental result.

OSTI ID:
22072262
Journal Information:
Review of Scientific Instruments, Vol. 83, Issue 3; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
Country of Publication:
United States
Language:
English

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