An in-vacuum x-ray diffraction microscope for use in the 0.7-2.9 keV range
- Australian Research Council Centre of Excellence for Coherent X-ray Science (Australia)
- Argonne National Laboratory, Argonne, Illinois 60439 (United States)
- Department of Physics, La Trobe University, Bundoora, Victoria 3086 (Australia)
- Xradia, Inc., 4385 Hopyard Road, Pleasanton, California 94588 (United States)
A dedicated in-vacuum coherent x-ray diffraction microscope was installed at the 2-ID-B beamline of the Advanced Photon Source for use with 0.7-2.9 keV x-rays. The instrument can accommodate three common implementations of diffractive imaging; plane wave illumination; defocused-probe (Fresnel diffractive imaging) and scanning (ptychography) using either a pinhole, focused or defocused probe. The microscope design includes active feedback to limit motion of the optics with respect to the sample. Upper bounds on the relative optics-to-sample displacement have been measured to be 5.8 nm(v) and 4.4 nm(h) rms/h using capacitance micrometry and 27 nm/h using x-ray point projection imaging. The stability of the measurement platform and in-vacuum operation allows for long exposure times, high signal-to-noise and large dynamic range two-dimensional intensity measurements to be acquired. Finally, we illustrate the microscope's stability with a recent experimental result.
- OSTI ID:
- 22072262
- Journal Information:
- Review of Scientific Instruments, Vol. 83, Issue 3; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
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