Disturbance-free phase-shifting laser diode interferometer using adaptive feedback control
A feedback-control-equipped phase-shifting laser diode interferometer that eliminates external disturbance is proposed. The feedback loop is stabilized by adaptive control of the polarity of the interference signal. Conventional phase-shifting interferometry can be used with the feedback control, resulting in simplified signal processing and accurate measurement. Several experiments confirm the stability of the feedback control with a measurement repeatability of 1.8 nm.
- OSTI ID:
- 22036414
- Journal Information:
- Applied Optics, Vol. 48, Issue 29; Other Information: (c) 2009 Optical Society of America; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6935
- Country of Publication:
- United States
- Language:
- English
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