Strain Relaxation and Vacancy Creation in Thin Platinum Films

Journal Article · Fri Dec 23 00:00:00 EST 2011 · Physical Review Letters

DOI:https://doi.org/10.1103/PHYSREVLETT.107.265501· OSTI ID:21612580

Gruber, W; Chakravarty, S; Schmidt, H ^[1]; Baehtz, C ^[2]; Leitenberger, W ^[3]; Bruns, M ^[4]; Kobler, A; Kuebel, C ^[5]

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1. Technische Universitaet Clausthal, Institut fuer Metallurgie, Clausthal-Zellerfeld (Germany)
2. Helmholtz Zentrum Dresden Rossendorf, Institute of Ion Beam Physics and Materials Research, Dresden (Germany)
3. Universitaet Potsdam, Institut fuer Physik und Astronomie, Potsdam (Germany)
4. Karlsruher Institut fuer Technologie, Institute for Applied Materials, Eggenstein-Leopoldshafen (Germany)
5. Karlsruher Institut fuer Technologie, Institute of Nanotechnology, Eggenstein-Leopoldshafen (Germany)

Synchrotron based combined in situ x-ray diffractometry and reflectometry is used to investigate the role of vacancies for the relaxation of residual stress in thin metallic Pt films. From the experimentally determined relative changes of the lattice parameter a and of the film thickness L the modification of vacancy concentration and residual strain was derived as a function of annealing time at 130 deg. C. The results indicate that relaxation of strain resulting from compressive stress is accompanied by the creation of vacancies at the free film surface. This proves experimentally the postulated dominant role of vacancies for stress relaxation in thin metal films close to room temperature.

• OSTI ID: 21612580
• Journal Information: Physical Review Letters, Vol. 107, Issue 26; Other Information: DOI: 10.1103/PhysRevLett.107.265501; (c) 2011 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0031-9007
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ANNEALING
LATTICE PARAMETERS
PLATINUM
RESIDUAL STRESSES
STRESS RELAXATION
TEMPERATURE RANGE 0273-0400 K
THICKNESS
THIN FILMS
VACANCIES
X-RAY DIFFRACTION
COHERENT SCATTERING
CRYSTAL DEFECTS
CRYSTAL STRUCTURE
DIFFRACTION
DIMENSIONS
ELEMENTS
FILMS
HEAT TREATMENTS
METALS
PLATINUM METALS
POINT DEFECTS
RELAXATION
SCATTERING
STRESSES
TEMPERATURE RANGE
TRANSITION ELEMENTS