Ion energy distribution near a plasma meniscus with beam extraction for multi element focused ion beams
- Department of Physics, Indian Institute of Technology, Kanpur 208016, Uttar Pradesh (India)
An earlier study of the axial ion energy distribution in the extraction region (plasma meniscus) of a compact microwave plasma ion source showed that the axial ion energy spread near the meniscus is small ({approx}5 eV) and comparable to that of a liquid metal ion source, making it a promising candidate for focused ion beam (FIB) applications [J. V. Mathew and S. Bhattacharjee, J. Appl. Phys. 105, 96101 (2009)]. In the present work we have investigated the radial ion energy distribution (IED) under the influence of beam extraction. Initially a single Einzel lens system has been used for beam extraction with potentials up to -6 kV for obtaining parallel beams. In situ measurements of IED with extraction voltages upto -5 kV indicates that beam extraction has a weak influence on the energy spread ({+-}0.5 eV) which is of significance from the point of view of FIB applications. It is found that by reducing the geometrical acceptance angle at the ion energy analyzer probe, close to unidirectional distribution can be obtained with a spread that is smaller by at least 1 eV.
- OSTI ID:
- 21476175
- Journal Information:
- Journal of Applied Physics, Vol. 107, Issue 9; Other Information: DOI: 10.1063/1.3369287; (c) 2010 American Institute of Physics; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
Similar Records
Energy distribution properties of focused ion beams from liquid metal ion sources
Subcutoff microwave driven plasma ion sources for multielemental focused ion beam systems
Related Subjects
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
BEAM ACCEPTANCE
BEAM EXTRACTION
BEAM-PLASMA SYSTEMS
ELECTRIC POTENTIAL
ENERGY SPECTRA
EV RANGE
ION BEAMS
ION SOURCES
ION SPECTROSCOPY
MICROWAVE RADIATION
PLASMA
BEAMS
ELECTROMAGNETIC RADIATION
ENERGY RANGE
RADIATIONS
SPECTRA
SPECTROSCOPY