Effects of Processing Parameters on Internal Stress of BN Films Prepared by Ion Mixing and Vapor Deposition
- Graduate School of Engineering, University of Hyogo, Shosha 2167, Himeji, Hyogo 671-2280 (Japan)
Boron nitride (BN) films have been attractive due to their excellent properties such as high hardness, thermal conductivity and chemical stability. In this study, BN films were prepared by depositing B vapor under simultaneous irradiation of N ions, that is ion mixing and vapor deposition (IVD) technique. The effects of processing parameters such as, acceleration voltage of N ions, transport ratio B/N and substrate temperature, on the internal stress of BN films were investigated. As a result, compressive internal stress increases at low acceleration voltage and high transport ratio B/N, which corresponded to the condition for formation of cBN phase. The hardness also becomes high at this condition and there is a strong correlation between internal stress and hardness of BN film. In addition to that, relaxation of internal stress by inserting inner layer between substrate and cBN layer has been carried out. It is confirmed that internal stress can be decreased by inner layer. Especially, relaxation of internal stress without degradation of high hardness can be achieved when the crystal structure of inner layer is hBN.
- OSTI ID:
- 21428627
- Journal Information:
- AIP Conference Proceedings, Vol. 1282, Issue 1; Conference: 7. international symposium on applied plasma science, Hamburg (Germany), 31 Aug - 4 Sep 2009; Other Information: DOI: 10.1063/1.3508521; (c) 2010 American Institute of Physics; ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BORON NITRIDES
CHEMICAL VAPOR DEPOSITION
CRYSTAL STRUCTURE
ENERGY BEAM DEPOSITION
FILMS
HARDNESS
ION BEAMS
IRRADIATION
LAYERS
NITROGEN IONS
PHASE STABILITY
RELAXATION
RESIDUAL STRESSES
SUBSTRATES
THERMAL CONDUCTIVITY
VAPORS
BEAMS
BORON COMPOUNDS
CHARGED PARTICLES
CHEMICAL COATING
DEPOSITION
FLUIDS
GASES
IONS
MECHANICAL PROPERTIES
NITRIDES
NITROGEN COMPOUNDS
PHYSICAL PROPERTIES
PNICTIDES
STABILITY
STRESSES
SURFACE COATING
THERMODYNAMIC PROPERTIES