Dust Growth by RF Sputtering

Journal Article · Sun Sep 07 00:00:00 EDT 2008 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.2996830· OSTI ID:21251228

Churton, B; Samarian, A A ^[1]; Coueedel, L ^[1]; Mikikian, M; Boufendi, L ^[2]

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1. School of Physics, University of Sydney, NSW 2006 (Australia)
2. GREMI, CNRS/Universite d'Orleans, 14 rue d'Issoudun, BP6744, 45067 Orleans Cedex 2 (France)

The effect of the dust particle growth by RF sputtering on glow discharge has been investigated. It has been found that the growth of dust particles modifies the electrical characteristics of the discharge. In particularly, the absolute value of the self-bias voltage decreases during the particle growth due to the electron losses on the dust particles. To find the correlation between the dust growth and the self bias evolution, dust particles have been collected at different times. The dust particle growth rate is found to be linear.

• OSTI ID: 21251228
• Journal Information: AIP Conference Proceedings, Vol. 1041, Issue 1; Conference: 5. international conference on the physics of dusty plasmas, Ponta Degada, Azores (Portugal), 18-23 May 2008; Other Information: DOI: 10.1063/1.2996830; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
COLLISIONS
CORRELATIONS
DUSTS
ELECTRIC POTENTIAL
ELECTRONS
FLUCTUATIONS
GLOW DISCHARGES
PLASMA
PLASMA INSTABILITY
RF SYSTEMS
SPUTTERING