Surface modification by molecular ions

Journal Article · Thu Jun 10 00:00:00 EDT 1999 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.59263· OSTI ID:21208053

Hanley, L; Schultz, D G; Ada, E T ^[1]

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1. Department of Chemistry, m/c 111, University of Illinois at Chicago, Chicago, Illinois 60607-7061 (United States)

There are several advantages in using molecular ions for surface modification. The modification can be confined to the uppermost layer of the surface, the molecular character of the ion can be imparted to the surface, and sputter yields are often higher. These effects are demonstrated by the use of mass selected ion beams incident on well characterized surfaces. Energy transfer is examined by detecting the masses and energies of ions scattered off surfaces and performing molecular dynamics simulations. Surface modification is followed by chemical analysis with x-ray photoelectron spectroscopy and surface mass spectrometry. TRIDYN monte carlo simulations are used to support some of the modification experiments. Energy transfer is examined for Si(CD{sub 3}){sub 3}{sup +} scattered off clean and hexanethiolate covered Au(111). Adsorbate desorption cross sections and substrate damage depths for NH{sub 3}/CO/Ni(111) are compared for 10-1000 eV isobaric atomic and polyatomic ions, Xe{sup +} and SF{sub 5}{sup +}. The surface chemical modification of polystyrene thin films by 10-100 eV SF{sub 5}{sup +} and C{sub 3}F{sub 5}{sup +} ions is also examined.

• OSTI ID: 21208053
• Journal Information: AIP Conference Proceedings, Vol. 475, Issue 1; Conference: 15. international conference on the application of accelerators in research and industry, Denton, TX (United States), 4-7 Nov 1998; Other Information: DOI: 10.1063/1.59263; (c) 1999 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
COMPUTERIZED SIMULATION
CROSS SECTIONS
CRYSTAL STRUCTURE
DEPTH
EV RANGE
GOLD
ION BEAMS
LAYERS
MASS SPECTROSCOPY
MOLECULAR DYNAMICS METHOD
MOLECULAR IONS
MONTE CARLO METHOD
POLYSTYRENE
RADIATION EFFECTS
SUBSTRATES
SURFACES
T CODES
THIN FILMS
X-RAY PHOTOELECTRON SPECTROSCOPY
XENON IONS