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Title: Advances in the calibration of atom probe tomographic reconstruction

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.3068197· OSTI ID:21186023
; ; ; ; ;  [1];  [2];  [3]
  1. Australian Key Centre for Microscopy and Microanalysis, Madsen Building F09, University of Sydney, NSW 2006 (Australia)
  2. Laboratoire Science et Ingenierie des MAteriaux et Procedes, UMR CNRS 5266, INP Grenoble-BP 46, Domaine Universitaire-101 rue de la Physique 38402, Saint Martin d'Heres (France)
  3. Centre for Health Informatics, University of New South Wales, Cliffbrook House, 45 Beach St., Coogee NSW 2034 (Australia)

Modern wide field-of-view atom probes permit observation of a wide range of crystallographic features that can be used to calibrate the tomographic reconstruction of the analyzed volume. In this study, methodologies to determine values of the geometric parameters involved in the tomographic reconstruction of atom probe data sets are presented and discussed. The influence of the tip to electrode distance and specimen temperature on these parameters is explored. Significantly, their influence is demonstrated to be very limited, indicating a relatively wide regime of experimental parameters space for sound atom probe tomography (APT) experiments. These methods have been used on several specimens and material types, and the results indicate that the reconstruction parameters are specific to each specimen. Finally, it is shown how an accurate calibration of the reconstruction enables improvements to the quality and reliability of the microscopy and microanalysis capabilities of the atom probe.

OSTI ID:
21186023
Journal Information:
Journal of Applied Physics, Vol. 105, Issue 3; Other Information: DOI: 10.1063/1.3068197; (c) 2009 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
Country of Publication:
United States
Language:
English

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