Paired circularly polarized heterodyne ellipsometer

Journal Article · Sun Feb 01 00:00:00 EST 2009 · Applied Optics

DOI:https://doi.org/10.1364/AO.48.000758· OSTI ID:21175984

Yu, C -J; Lin, C -E; Yu, L -P; Chou, C

We develop a paired circularly polarized heterodyne ellipsometer (PCPHE), in which a heterodyne interferometer based on a two-frequency circularly polarized laser beam is set up. It belongs to an amplitude-sensitive ellipsometer that is able to provide not only a wider dynamic range of polarization modulation frequency but also a higher detection sensitivity than that of a conventional photometric ellipsometer. A real-time and precise measurement of ellipsometric parameters, which demonstrated an accuracy of less than 1 nm on thickness measurement of SiO2 thin film deposited on silicon substrate, can be applied with the PCPHE.

• OSTI ID: 21175984
• Journal Information: Applied Optics, Vol. 48, Issue 4; Other Information: DOI: 10.1364/AO.48.000758; (c) 2009 Optical Society of America; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6935
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ACCURACY
AMPLITUDES
ELLIPSOMETERS
INTERFEROMETERS
LASERS
MODULATION
POLARIZATION
SENSITIVITY
SILICON
SUBSTRATES
THICKNESS
THIN FILMS