Study of a micro chamber quadrupole mass spectrometer

Journal Article · Sat Mar 15 00:00:00 EDT 2008 · Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films

DOI:https://doi.org/10.1116/1.2827512· OSTI ID:21124021

Jinchan, Wang; Xiaobing, Zhang; Fuming, Mao; Mei, Xiao; Yunkang, Cui; Engelsen, Daniel den; Wei, Lei ^[1]

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1. Jiangsu Information Display Engineering Research Center, School of Electronic Science and Engineering, Southeast University, Nanjing 210096 (China)

The design of a micro chamber quadrupole mass spectrometer (MCQMS) having a small total volume of only 20 cm{sup 3}, including Faraday cup ion detector and ion source, is described. This MCQMS can resist a vacuum baking temperature of 400-500 deg. C. The quadrupole elements with a hyperbolic surface are made of a ceramic material and coated with a thin metal layer. The quadrupole mass filter has a field radius of 3 mm and a length of 100 mm. Prototypes of this new MCQMS can detect a minimum partial pressure of 10{sup -8} Pa, have a peak width of {delta}M=1 at 10% peak height from mass number 1 to 60, and show an excellent long-term stability. The new MCQMS is intended to be used in residual gas analyses of electron devices during a mutual pumping and baking process.

• OSTI ID: 21124021
• Journal Information: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films, Vol. 26, Issue 2; Other Information: DOI: 10.1116/1.2827512; (c) 2008 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 0734-2101
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
CERAMICS
DESIGN
ELECTRONS
EQUIPMENT
FARADAY CUPS
FILTERS
GAS ANALYSIS
HEIGHT
ION SOURCES
IONS
LAYERS
MASS NUMBER
MASS SPECTROMETERS
METALS
PARTIAL PRESSURE
PEAKS
QUADRUPOLES
WIDTH