Effects of the Substrate Temperature in AuN Thin Films by Means of X-Ray Diffraction
- Plasma Physics Laboratory, Department of Physics and Chemical, Universidad Nacional de Colombia Sede Manizales A127 (Colombia)
Gold is used in electronic industry like electric conductor for products such as computers, mobiles phones, etc; with the drawback that it is one of the most expensive metals in the market. Gold Nitride is a new material, having excellent physics properties like high hardness, high melting point, high electric conductivity, chemical inertia and good thermodynamic stabily among others. At the moment its study is more about electronics, optics, mechanical properties and growth of the films. AuN thin films were produced by the PAPVD (Plasma assisted Physics Vapor Deposition) method, using the pulsed arc technique in a mono-vaporizer system. These films were created with an Au target of 99% purity and deposited on stainless steel 304. It was observed that heating the substrate produces small stoichiometric changes in the film, which makes small changes in the diffraction patterns to appear, like widening in the Au orientation, since the composicional gradient is varying according to the substrate temperature. Au 4f and N1s narrow spectra were analyzed using XPS (X-Ray Photoelectron Spectroscopy), in order to observe stoichiometry in the films.
- OSTI ID:
- 20898809
- Journal Information:
- AIP Conference Proceedings, Vol. 875, Issue 1; Conference: 16. IAEA technical meeting on research using small fusion devices; 11. Latin American workshop on plasma physics, Mexico City (Mexico), 30 Nov - 3 Dec 2005; 5-9 Dec 2005; Other Information: DOI: 10.1063/1.2405944; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
Similar Records
Deposition And Characterization of (Ti,Zr)N Thin Films Grown Through PAPVD By The Pulsed Arc Technique
Industrial Application of Thin Films (TiAl)N Deposited on Thermo-Wells