Strain Energy Effects on Texture Evolution in Thin Films: Biaxial vs. Uniaxial Stress State
Journal Article
·
· AIP Conference Proceedings
- Max Planck Institute for Metal Research, Heisenbergstrasse 3, 70569 Stuttgart (Germany)
- Department Material Physics, University of Leoben, Jahnstrasse 12, 8700 Leoben (Austria)
- Institute for Physical Metallurgy, University of Stuttgart, Heisenbergstrasse 3, 70569 Stuttgart (Germany)
Grain growth in thin films is usually accompanied by texture evolution due to the crystallographic dependencies of surface, interface and strain energies. In this work the driving forces for grain growth for a 1 and 5 {mu}m thick Cu thin film on a polyimide substrate are calculated assuming biaxial and uniaxial stress. While the results for the biaxial stress state are used to explain observed textures, for the case of uniaxial stress predictions suggest new ways to control the texture of thin films.
- OSTI ID:
- 20798177
- Journal Information:
- AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 817; ISSN 0094-243X; ISSN APCPCS
- Country of Publication:
- United States
- Language:
- English
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