Nanobump arrays fabricated by laser irradiation of polystyrene particle layers on silicon
- Nanotech Center, East China Normal University, North Zhongshan Rd. 3663, Shanghai 200062 (China)
Two-dimensional (2D) nanobump arrays were fabricated by laser irradiation of a regular lattice of absorptive polystyrene (PS) microspheres on an undoped (100) Si wafer. The experiments were performed with single-pulse 248 nm KrF laser radiation. The structure of the arrays fabricated by this method was characterized by field emission scanning electron microscope and atomic force microscope. The near-field effects under the absorptive particle are studied. The ablation and thermal processes induced by the optical near-field around the particles are investigated. The formation mechanism of nanobumps is discussed.
- OSTI ID:
- 20702366
- Journal Information:
- Applied Physics Letters, Vol. 86, Issue 16; Other Information: DOI: 10.1063/1.1886896; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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