skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Resonantly enhanced second-harmonic generation using III–V semiconductor all-dielectric metasurfaces

Journal Article · · Nano Letters

Nonlinear optical phenomena in nanostructured materials have been challenging our perceptions of nonlinear optical processes that have been explored since the invention of lasers. For example, the ability to control optical field confinement, enhancement, and scattering almost independently allows nonlinear frequency conversion efficiencies to be enhanced by many orders of magnitude compared to bulk materials. Also, the subwavelength length scale renders phase matching issues irrelevant. Compared with plasmonic nanostructures, dielectric resonator metamaterials show great promise for enhanced nonlinear optical processes due to their larger mode volumes. Here, we present, for the first time, resonantly enhanced second-harmonic generation (SHG) using gallium arsenide (GaAs) based dielectric metasurfaces. Using arrays of cylindrical resonators we observe SHG enhancement factors as large as 104 relative to unpatterned GaAs. At the magnetic dipole resonance, we measure an absolute nonlinear conversion efficiency of ~2 × 10–5 with ~3.4 GW/cm2 pump intensity. In conclusion, the polarization properties of the SHG reveal that both bulk and surface nonlinearities play important roles in the observed nonlinear process.

Research Organization:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
Grant/Contract Number:
AC04-94AL85000
OSTI ID:
1326369
Report Number(s):
SAND-2016-9155J; 647439
Journal Information:
Nano Letters, Vol. 16, Issue 9; ISSN 1530-6984
Publisher:
American Chemical SocietyCopyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 286 works
Citation information provided by
Web of Science

References (43)

Generation of Optical Harmonics journal August 1961
Light Waves at the Boundary of Nonlinear Media journal October 1962
Interactions between Light Waves in a Nonlinear Dielectric journal September 1962
Nonlinear plasmonics journal November 2012
Functional and nonlinear optical metasurfaces: Optical metasurfaces journal March 2015
Experiments on second- and third-harmonic generation from magnetic metamaterials journal January 2007
Second-Harmonic Generation from Magnetic Metamaterials journal July 2006
Mode matching in multiresonant plasmonic nanoantennas for enhanced second harmonic generation journal April 2015
Enhanced second-harmonic generation from double resonant plasmonic antennae journal January 2012
Multiresonant Broadband Optical Antennas As Efficient Tunable Nanosources of Second Harmonic Light journal January 2012
Three-Dimensional Nanostructures as Highly Efficient Generators of Second Harmonic Light journal December 2011
Phased-array sources based on nonlinear metamaterial nanocavities journal July 2015
Giant nonlinear response from plasmonic metasurfaces coupled to intersubband transitions journal July 2014
Optical magnetic mirrors without metals journal January 2014
Realization of tellurium-based all dielectric optical metamaterials using a multi-cycle deposition-etch process journal April 2013
Realizing Optical Magnetism from Dielectric Metamaterials journal February 2012
High-Efficiency Dielectric Huygens’ Surfaces journal February 2015
Tailoring Directional Scattering through Magnetic and Electric Resonances in Subwavelength Silicon Nanodisks journal August 2013
High-transmission dielectric metasurface with 2π phase control at visible wavelengths: High-transmission dielectric metasurface with 2π phase control at visible wavelengths journal June 2015
High-Efficiency All-Dielectric Metasurfaces for Ultracompact Beam Manipulation in Transmission Mode journal August 2015
Polarization-Independent Silicon Metadevices for Efficient Optical Wavefront Control journal July 2015
Dielectric gradient metasurface optical elements journal July 2014
Realization of an all-dielectric zero-index optical metamaterial journal August 2013
Efficient Polarization-Insensitive Complex Wavefront Control Using Huygens’ Metasurfaces Based on Dielectric Resonant Meta-atoms journal March 2016
Enhanced Third-Harmonic Generation in Silicon Nanoparticles Driven by Magnetic Response journal October 2014
Nonlinear Fano-Resonant Dielectric Metasurfaces journal October 2015
Advances in selective wet oxidation of AlGaAs alloys journal June 1997
Fabrication and performance of selectively oxidized vertical-cavity lasers journal November 1995
Characterization of the Oxide Film Obtained by Wet Oxidation of Al-Rich AlGaAs journal February 2012
Optical constants of (Al0.98Ga0.02)xOy native oxides journal December 1998
III–V Semiconductor Nanoresonators—A New Strategy for Passive, Active, and Nonlinear All‐Dielectric Metamaterials journal June 2016
Accurate second-order susceptibility measurements of visible and infrared nonlinear crystals journal August 1976
Selection rules for second-harmonic generation in nanoparticles journal September 2007
Second-harmonic generation from split-ring resonators on a GaAs substrate journal January 2009
Experimental quantification of surface optical nonlinearity in GaP nanopillar waveguides journal January 2015
Surface Second-Harmonic Generation from Vertical GaP Nanopillars journal January 2012
Laterally Emitted Surface Second Harmonic Generation in a Single ZnTe Nanowire journal August 2013
Meep: A flexible free-software package for electromagnetic simulations by the FDTD method journal March 2010
Enhanced second-harmonic generation from magnetic resonance in AlGaAs nanoantennas journal January 2015
Second harmonic generation study of internallygenerated strain in bismuth-substituted iron garnet films journal January 2010
Strain dependence of second-harmonic generation in silicon journal January 2010
Second-harmonic generation from CuInSe/sub 2/ thin films: influence of the substrate-epilayer lattice mismatch journal January 1997
Second-harmonic generation from realistic film–substrate interfaces: The effects of strain journal April 2000

Cited By (75)

Resonant dielectric metasurfaces: active tuning and nonlinear effects journal July 2019
Polarization properties of second-harmonic generation in AlGaAs optical nanoantennas journal January 2017
Optically resonant dielectric nanostructures journal November 2016
Reconfiguring structured light beams using nonlinear metasurfaces journal January 2018
Nanoscale Polarization Manipulation and Encryption Based on Dielectric Metasurfaces journal July 2018
Nonlinear Vectorial Metasurface for Optical Encryption journal August 2019
Controlling second-harmonic generation at the nanoscale with monolithic AlGaAs-on-AlOx antennas journal February 2017
Dynamic radiative tailoring based on mid-refractive dielectric nanoantennas journal January 2019
Revealing Low-Radiative Modes of Nanoresonators with Internal Raman Scattering journal July 2019
Self-tuning of second-harmonic generation in GaAs nanowires enabled by nonlinear absorption journal January 2019
Fano Resonance on Nanostructured Lithium Niobate for Highly Efficient and Tunable Second Harmonic Generation journal January 2019
Imaging through Nonlinear Metalens Using Second Harmonic Generation journal January 2018
Spontaneous photon-pair generation from a dielectric nanoantenna journal January 2019
All‐Dielectric Silicon Metasurface with Strong Subterahertz Toroidal Dipole Resonance journal July 2019
Lattice effect influence on the electric and magnetic dipole resonance overlap in a disk array journal September 2018
Enhanced Nonlinear Yield from Barium Titanate Metasurface Down to the Near Ultraviolet journal August 2019
Dynamic Nonlinear Image Tuning through Magnetic Dipole Quasi‐BIC Ultrathin Resonators journal May 2019
Nonlinear optics in all-dielectric nanoantennas and metasurfaces: a review journal March 2019
Giant Nonlinear Response at the Nanoscale Driven by Bound States in the Continuum journal July 2018
Ultrafast all-optical tuning of direct-gap semiconductor metasurfaces journal May 2017
Efficient Ultraviolet Nanosources Based on Third‐Harmonic Generation in Dielectric–Metal Composite Nanodisks journal December 2019
Strongly resonant metasurfaces supported by reflective substrates for highly efficient second- and high-harmonic generations with ultralow pump intensity journal January 2019
Toroidal metasurface resonances in microwave waveguides journal May 2019
A review of dielectric optical metasurfaces for wavefront control journal June 2018
Directional lasing in resonant semiconductor nanoantenna arrays journal August 2018
All-dielectric metasurfaces with trapped modes: Group-theoretical description journal April 2019
Multifunctional Metasurfaces Based on Direct Nanoimprint of Titania Sol–Gel Coatings journal March 2019
Enhanced high-harmonic generation from an all-dielectric metasurface journal August 2018
All‐Optical Nanoscale Heating and Thermometry with Resonant Dielectric Nanoparticles for Controllable Drug Release in Living Cells journal February 2020
Thermal tuning capabilities of semiconductor metasurface resonators journal November 2018
Tailored Nonlinear Anisotropy in Mie‐Resonant Dielectric Oligomers journal July 2019
Nonlinear optics in plasmonic nanostructures journal June 2018
Tailorable Dynamics in Nonlinear Optical Metasurfaces journal June 2019
Nonlinear Plasmonic Metasurfaces journal July 2018
Interaction of semiconductor metasurfaces with short laser pulses: From nonlinear-optical response toward spatiotemporal shaping journal August 2019
Resonant harmonic generation in AlGaAs nanoantennas probed by cylindrical vector beams journal January 2019
Approach to analysis of all-dielectric free-form antenna systems journal January 2019
Self-assembly of nanostructured glass metasurfaces via templated fluid instabilities journal February 2019
Enhanced third harmonic generation with graphene metasurfaces journal August 2017
Engineering novel tunable optical high-Q nanoparticle array filters for a wide range of wavelengths journal January 2020
All-Dielectric Nanoresonators for χ(2) Nonlinear Optics journal December 2019
Boosting Second Harmonic Radiation from AlGaAs Nanoantennas with Epsilon-Near-Zero Materials journal November 2018
Highly-Efficient Longitudinal Second-Harmonic Generation from Doubly-Resonant AlGaAs Nanoantennas journal September 2018
Enhanced second harmonic generation in individual barium titanate nanoparticles driven by Mie resonances journal January 2017
All-dielectric nanophotonics: the quest for better materials and fabrication techniques journal January 2017
Zinc oxide based dielectric nanoantennas for efficient nonlinear frequency conversion journal February 2019
Resonant dielectric nanostructures: a low-loss platform for functional nanophotonics journal September 2016
Frequency mixing at an electromagnetically induced transparency like metasurface loaded with gas as a nonlinear element journal August 2018
Second harmonic generation in monolithic lithium niobate metasurfaces journal January 2019
Gradient metasurfaces: a review of fundamentals and applications journal December 2017
Imaging Electric and Magnetic Modes and Their Hybridization in Single and Dimer AlGaAs Nanoantennas journal July 2018
Second-Harmonic Generation in Mie-Resonant GaAs Nanowires journal August 2019
Coherent control of the noninstantaneous nonlinear power-law response in resonant nanostructures journal January 2020
Third‐Harmonic Generation from Plasmonic Metasurfaces Coupled to Intersubband Transitions journal February 2019
Idealized Einstein-Podolsky-Rosen states from non–phase-matched parametric down-conversion journal January 2020
Guided‐Mode Resonances in All‐Dielectric Terahertz Metasurfaces journal September 2019
Tuning the second-harmonic generation in AlGaAs nanodimers via non-radiative state optimization [Invited] journal January 2018
Boosting third-harmonic generation by a mirror-enhanced anapole resonator journal July 2018
Multipolar analysis of the second harmonic generated by dielectric particles journal January 2019
Solar harvesting based on perfect absorbing all-dielectric nanoresonators on a mirror journal January 2019
MEMS-tunable dielectric metasurface lens journal February 2018
Inverse-designed photonic fibers and metasurfaces for nonlinear frequency conversion [Invited] journal January 2018
Numerical Study on Mie Resonances in Single GaAs Nanomembranes journal June 2019
Degenerate optical nonlinear enhancement in epsilon-near-zero transparent conducting oxides journal January 2018
Revealing Low-Radiative Modes of Nanoresonators with Internal Raman Scattering
  • Baryshnikova, K. V.; Frizyuk, K.; Zograf, G.
  • ПИСЬМА В ЖУРНАЛ ЭКСПЕРИМЕНТАЛЬНОЙ И ТЕОРЕТИЧЕСКОЙ ФИЗИКИ, Vol. 110, Issue 1(7) https://doi.org/10.1134/s0370274x19130046
journal January 2019
Enhanced Nonlinear Yield from Barium Titanate Metasurface Down to the Near Ultraviolet text January 2019
MEMS-tunable dielectric metasurface lens conference January 2018
All-dielectric nanophotonics: the quest for better materials and fabrication techniques preprint January 2017
Gradient metasurfaces: a review of fundamentals and applications text January 2017
Thermal tuning capabilities of semiconductor metasurface resonators preprint January 2018
Giant nonlinear response at the nanoscale driven by bound states in the continuum text January 2018
Reconfiguring structured light beams using nonlinear metasurfaces text January 2018
All-dielectric metasurfaces with trapped modes: group-theoretical description text January 2018
Coherent Control of the Non-instantaneous Nonlinear Power-law Response in Resonant Nanostructures text January 2019
An all-dielectric metasurface as a broadband optical frequency mixer journal June 2018