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Title: A Novel Backside Gate Structure to Improve Device Performance

Authors:
 [1] ;  [2] ;  [2] ;  [2] ;  [1] ;  [3] ;  [4] ;  [1]
  1. University of Florida
  2. University of Florida, Gainesville
  3. ORNL
  4. Arizona State University
Publication Date:
OSTI Identifier:
1265750
DOE Contract Number:
AC05-00OR22725
Resource Type:
Conference
Resource Relation:
Conference: 227th ECS Meeting, Chicago, IL, USA, 20150524, 20150528
Research Org:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)
Sponsoring Org:
USDOE Office of Science (SC)
Country of Publication:
United States
Language:
English