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Title: Phase formation and texture of thin nickel germanides on Ge(001) and Ge(111)

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.4945317· OSTI ID:1354477
ORCiD logo [1];  [2];  [2];  [3];  [4];  [3];  [4];  [5];  [2];  [1]
  1. Ghent Univ. (Belgium)
  2. KU Leuven (Belgium)
  3. Univ. of Antwerp (Belgium)
  4. IBM T.J. Watson Research Center, Yorktown Heights, NY (United States)
  5. Univ. of Cape Town, Rondebosch (South Africa); iThemba LABs, Somerset West (South Africa)

We studied the solid-phase reaction between a thin Ni film and a single crystal Ge(001) or Ge(111) substrate during a ramp anneal. The phase formation sequence was determined using in situ X-ray diffraction and in situ Rutherford backscattering spectrometry (RBS), while the nature and the texture of the phases were studied using X-ray pole figures and transmission electron microscopy. The phase sequence is characterized by the formation of a single transient phase before NiGe forms as the final and stable phase. X-ray pole figures were used to unambiguously identify the transient phase as the ϵ-phase, a non-stoichiometric Ni-rich germanide with a hexagonal crystal structure that can exist for Ge concentrations between 34% and 48% and which forms with a different epitaxial texture on both substrate orientations. Here, the complementary information gained from both RBS and X-ray pole figure measurements revealed a simultaneous growth of both the ϵ-phase and NiGe over a small temperature window on both substrate orientations.

Research Organization:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES); European Research Council (ERC)
Grant/Contract Number:
SC00112704; AC02-98CH10886; #335078-COLOURATOMS; GOA/14/007; GOA 01G01513
OSTI ID:
1354477
Alternate ID(s):
OSTI ID: 1245504
Report Number(s):
BNL-112994-2016-JA; JAPIAU
Journal Information:
Journal of Applied Physics, Vol. 119, Issue 13; ISSN 0021-8979
Publisher:
American Institute of Physics (AIP)Copyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 14 works
Citation information provided by
Web of Science

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Cited By (3)

Improving the morphological stability of nickel germanide by tantalum and tungsten additions journal March 2018
Impact of Pt on the phase formation sequence, morphology, and electrical properties of Ni(Pt)/Ge 0.9 Sn 0.1 system during solid-state reaction journal August 2018
Ni/GeSn solid-state reaction monitored by combined X-ray diffraction analyses: focus on the Ni-rich phase journal July 2018