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Title: A New Paradigm for X-ray Optics Nanopositioning Final Technical Report

Final report on A New Paradigm for X-ray Optics Nanopositioning. This detials control work and flexure stage design for an X-ray optic nanopositioning device.
Authors:
 [1] ;  [2] ;  [3]
  1. Argonne National Lab. (ANL), Argonne, IL (United States)
  2. Univ. of Illinois, Champaign, IL (United States)
  3. Royston Engineering Research, Chicago, IL (United States)
Publication Date:
OSTI Identifier:
1237040
Report Number(s):
DOE-ANL--0004283
6302523020
DOE Contract Number:
SC0004283
Resource Type:
Technical Report
Research Org:
Royston Engineering Research
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; 77 NANOSCIENCE AND NANOTECHNOLOGY nanoposition X-ray microscope flexure