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Title: Studies of the Origins of Half-Loop Arrays and Interfacial Dislocations Observed in Homoepitaxial Layers of 4H-SiC

Journal Article · · Journal of Electronic Materials

Research Organization:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
DOE Contract Number:
SC00112704
OSTI ID:
1229417
Report Number(s):
BNL-111493-2015-JA
Journal Information:
Journal of Electronic Materials, Vol. 44, Issue 5; ISSN 0361-5235
Publisher:
Springer
Country of Publication:
United States
Language:
English

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