Control of surface mobility for conformal deposition of Mo-Si multilayers on saw-tooth substrates
Journal Article
·
· Applied Surface Science
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC)
- DOE Contract Number:
- DE-AC02-05CH11231
- OSTI ID:
- 1171361
- Report Number(s):
- LBNL-6241E
- Journal Information:
- Applied Surface Science, Vol. 284; ISSN 0169-4332
- Publisher:
- Elsevier
- Country of Publication:
- United States
- Language:
- English
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