skip to main content

Title: Control of surface mobility for conformal deposition of Mo-Si multilayers on saw-tooth substrates

Authors:
; ; ; ; ; ;
Publication Date:
OSTI Identifier:
1171361
Report Number(s):
LBNL-6241E
Journal ID: ISSN 0169-4332
DOE Contract Number:
DE-AC02-05CH11231
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Surface Science; Journal Volume: 284
Publisher:
Elsevier
Research Org:
Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)
Sponsoring Org:
USDOE Office of Science (SC)
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; 36 MATERIALS SCIENCE