Modulation of the growth per cycle in Atomic Layer Deposition using reversible surface functionalization
- Research Organization:
- Energy Frontier Research Centers (EFRC) (United States). Institute for Atom-efficient Chemical Transformations (IACT)
- Sponsoring Organization:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- DOE Contract Number:
- AC02-06CH11357
- OSTI ID:
- 1160924
- Journal Information:
- Chem. Mater., Related Information: IACT partners with Argonne National Laboratory (lead); Brookhaven National Laboratory; Northwestern University; Purdue University; University of Wisconsin at Madison
- Country of Publication:
- United States
- Language:
- English
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