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Title: Capacitive chemical sensor

Patent ·
OSTI ID:1132610

A microfabricated capacitive chemical sensor can be used as an autonomous chemical sensor or as an analyte-sensitive chemical preconcentrator in a larger microanalytical system. The capacitive chemical sensor detects changes in sensing film dielectric properties, such as the dielectric constant, conductivity, or dimensionality. These changes result from the interaction of a target analyte with the sensing film. This capability provides a low-power, self-heating chemical sensor suitable for remote and unattended sensing applications. The capacitive chemical sensor also enables a smart, analyte-sensitive chemical preconcentrator. After sorption of the sample by the sensing film, the film can be rapidly heated to release the sample for further analysis. Therefore, the capacitive chemical sensor can optimize the sample collection time prior to release to enable the rapid and accurate analysis of analytes by a microanalytical system.

Research Organization:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
8,736,000
Application Number:
11/583,442
OSTI ID:
1132610
Resource Relation:
Patent File Date: 2006 Oct 19
Country of Publication:
United States
Language:
English

References (11)

Chemical preconcentrator patent January 2001
Sensor for chemical and biological materials patent May 2004
Microcombustor patent September 2004
Biological preconcentrator patent September 2008
Circuit configuration and method for assessing capacitances in matrices patent-application April 2003
2D/3D chemical sensors and methods of fabricating and operating the same patent-application May 2003
Sensor produced using imprint lithography patent-application October 2004
Gas-phase selective etching of native oxide journal January 1990
Nanoporous-carbon films for microsensor preconcentrators journal May 2002
Etching of thin SiO 2 layers using wet HF gas
  • van der Heide, P. A. M.; Baan Hofman, M. J.; Ronde, H. J.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 7, Issue 3 https://doi.org/10.1116/1.576033
journal May 1989
Mechanisms of the HF/H 2 O vapor phase etching of SiO 2 journal July 1992

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