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Title: Arrays of ultrathin silicon solar microcells

Patent ·
OSTI ID:1128543

Provided are solar cells, photovoltaics and related methods for making solar cells, wherein the solar cell is made of ultrathin solar grade or low quality silicon. In an aspect, the invention is a method of making a solar cell by providing a solar cell substrate having a receiving surface and assembling a printable semiconductor element on the receiving surface of the substrate via contact printing. The semiconductor element has a thickness that is less than or equal to 100 .mu.m and, for example, is made from low grade Si.

Research Organization:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
FG02-07ER46453; FG02-07ER46471
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
Patent Number(s):
8,679,888
Application Number:
13/120,486
OSTI ID:
1128543
Country of Publication:
United States
Language:
English

References (134)

Fabrication of thin film solar cells utilizing epitaxial deposition onto a liquid surface to obtain lateral growth patent November 1977
Hybrid method for depositing semi-conductive materials patent August 1995
Photovoltaic device having a semiconductor grade silicon layer formed on a metallurgical grade substrate patent October 1995
Multi-phase back contacts for CIS solar cells patent December 1995
Tunable dispersion compensator and optical system comprising same patent November 2000
Self-assembled monolayer directed patterning of surfaces patent February 2003
Decal transfer microfabrication patent October 2004
Composite patterning devices for soft lithography patent March 2007
Stretchable form of single crystal silicon for high performance electronics on rubber substrates patent April 2009
Stretchable semiconductor elements and stretchable electrical circuits patent July 2009
Methods and devices for fabricating and assembling printable semiconductor elements patent November 2009
Decal transfer lithography patent February 2010
Methods and devices for fabricating three-dimensional nanoscale structures patent April 2010
Multispectral plasmonic crystal sensors patent April 2010
Method for manufacturing polycrystalline silicon, and polycrystalline silicon for solar cells manufactured by the method patent June 2010
Printable semiconductor structures and related methods of making and assembling patent September 2010
Microfluidic electrochemical reactors patent March 2011
Release strategies for making transferable semiconductor structures, devices and device components patent April 2011
Pattern transfer printing by kinetic control of adhesion to an elastomeric stamp patent May 2011
Optical systems fabricated by printing-based assembly patent July 2011
Methods and devices for fabricating and assembling printable semiconductor elements patent July 2011
Solar cell with reduced base diffusion area patent August 2011
Printable semiconductor structures and related methods of making and assembling patent October 2011
Stretchable form of single crystal silicon for high performance electronics on rubber substrates patent June 2012
Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics patent July 2012
Sub-micron decal transfer lithography patent August 2012
Methods of making spatially aligned nanotubes and nanotube arrays patent February 2013
Tandem photovoltaic cell stacks patent-application October 2004
Photovoltaic power generation system patent-application October 2004
Detection and ablation of localized shunting defects in photovoltaics patent-application October 2007
Devices and methods for pattern generation by ink lithography patent-application March 2008
Release Strategies For Making Transferable Semiconductor Structures, Devices And Device Components patent-application May 2008
Germanium-Enriched SIlicon Material for Making Solar Cells patent-application December 2009
Stretchable and Foldable Electronic Devices patent-application July 2010
Printable, Flexible and Stretchable Diamond for Thermal Management patent-application March 2010
Printed Assemblies of Ultrathin, Microscale Inorganic Light Emitting Diodes for Deformable and Semitransparent Displays patent-application December 2010
Medium Scale Carbon Nanotube Thin Film Integrated Circuits on Flexible Plastic Substrates patent-application June 2011
High Resolution Printing of Charge patent-application July 2011
Release Strategies for Making Transferable Semiconductor Structures, Devices and Device Components patent-application July 2011
High Resolution Electrohydrodynamic Jet Printing for Manufacturing Systems patent-application August 2011
Methods and Devices for Fabricating and Assembling Printable Semiconductor Elements patent-application September 2011
Implantable Biomedical Devices On Bioresorbable Substrates patent-application September 2011
Optical Systems Fabricated by Printing-Based Assembly patent-application November 2011
Arrays of Ultrathin Silicon Solar Microcells patent-application November 2011
Release Strategies for Making Transferable Semiconductor Structures, Devices and Device Components patent-application December 2011
Printable Semiconductor Structures and Related Methods of Making and Assembling patent-application April 2012
High Resolution Sensing and Control of Electrohydrodynamic Jet Printing patent-application May 2012
High-Speed, High-Resolution Electrophysiology In-Vivo Using Conformal Electronics patent-application June 2012
Waterproof stretchable optoelectronics patent-application June 2012
Optical Component Array Having Adjustable Curvature patent-application October 2012
Thermally Managed LED Arrays Assembled by Printing patent-application December 2012
Controlled Buckling Structures in Semiconductor Interconnects and Nanomembranes for Stretchable Electronics patent-application December 2012
Non-Contact Transfer Printing patent-application February 2013
Flexible and Stretchable Electronic Systems for Epidermal Electronics patent-application February 2013
Bendable integrated circuits on plastic substrates by use of printed ribbons of single-crystalline silicon journal May 2007
Heterogeneous Three-Dimensional Electronics by Use of Printed Semiconductor Nanomaterials journal December 2006
High-speed mechanically flexible single-crystal silicon thin-film transistors on plastic substrates journal June 2006
Additive Soft-Lithographic Patterning of Submicrometer- and Nanometer-Scale Large-Area Resists on Electronic Materials journal December 2005
Semiconductor Wires and Ribbons for High‐ Performance Flexible Electronics journal July 2008
Printable Single-Crystal Silicon Micro/Nanoscale Ribbons, Platelets and Bars Generated from Bulk Wafers journal November 2007
Photovoltaic technologies journal December 2008
Crystalline Si thin-film solar cells: a review journal August 1999
Characterization of microspherical semi-transparent solar cells and modules journal June 2007
Review of Layer Transfer Processes for Crystalline Thin-Film Silicon Solar Cells journal July 2001
Ultrathin crystalline silicon solar cells on glass substrates journal January 1997
Modeling thin-film PV devices
  • Burgelman, Marc; Verschraegen, Johan; Degrave, Stefaan
  • Progress in Photovoltaics: Research and Applications, Vol. 12, Issue 23 https://doi.org/10.1002/pip.524
journal March 2004
Thermal conductivity of epitaxial layers of dilute SiGe alloys journal June 2005
Light trapping properties of pyramidally textured surfaces journal July 1987
Patterning of Thin-Film Microstructures on Non-Planar Substrate Surfaces Using Decal Transfer Lithography journal August 2004
PC1D version 5: 32-bit solar cell modeling on personal computers conference January 1997
Modelling free-carrier absorption in solar cells journal July 1997
Rapid Thermal Processing of High Efficiency N-Type Silicon Solar Cells with Al Back Junction
  • Ebong, A.; Upadhyaya, V.; Rounsaville, B.
  • Conference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, 2006 IEEE 4th World Conference on Photovoltaic Energy Conference https://doi.org/10.1109/WCPEC.2006.279688
conference May 2006
Design of Highly Efficient Light-Trapping Structures for Thin-Film Crystalline Silicon Solar Cells journal August 2007
Crystalline and thin-film silicon solar cells: state of the art and future potential journal March 2003
Submicrometer gratings for solar energy applications journal January 1995
Collapse of stamps for soft lithography due to interfacial adhesion journal April 2005
Stamp Collapse in Soft Lithography journal August 2005
Nanotransfer printing by use of noncovalent surface forces: Applications to thin-film transistors that use single-walled carbon nanotube networks and semiconducting polymers journal December 2004
Fabricating three-dimensional nanostructures using two photon lithography in a single exposure step journal January 2006
Optically Fabricated Three Dimensional Nanofluidic Mixers for Microfluidic Devices journal July 2005
Three-Dimensional Nanofabrication with Rubber Stamps and Conformable Photomasks journal August 2004
Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks journal August 2004
Solar photovoltaics R&D at the tipping point: A 2005 technology overview journal February 2006
Back-contact solar cells: a review
  • Kerschaver, Emmanuel Van; Beaucarne, Guy
  • Progress in Photovoltaics: Research and Applications, Vol. 14, Issue 2, p. 107-123 https://doi.org/10.1002/pip.657
journal January 2006
A Stretchable Form of Single-Crystal Silicon for High-Performance Electronics on Rubber Substrates journal January 2006
Bulk Quantities of Single-Crystal Silicon Micro-/Nanoribbons Generated from Bulk Wafers journal October 2006
Low-cost, low-loss microlens arrays fabricated by soft-lithography replication process journal February 2003
Fabrication of large-area stamps, moulds, and conformable photomasks for soft lithography
  • Lee, H. H.; Menard, E.; Tassi, N. G.
  • Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems, Vol. 218, Issue 1 https://doi.org/10.1243/174034905X41949
journal June 2004
Bendable GaN high electron mobility transistors on plastic substrates journal December 2006
Large-Area, Selective Transfer of Microstructured Silicon: A Printing- Based Approach to High-Performance Thin-Film Transistors Supported on Flexible Substrates journal October 2005
A Printable Form of Single-Crystalline Gallium Nitride for Flexible Optoelectronic Systems journal October 2005
Grain boundary compositions in Cu(InGa)Se2 journal January 2007
Interface reactions and Kirkendall voids in metal organic vapor-phase epitaxy grown Cu(In,Ga)Se[sub 2] thin films on GaAs journal January 2006
Void formation and surface energies in Cu(InGa)Se2 journal October 2006
Cu depletion at the CuInSe2 surface journal April 2003
A concentrator module of spherical Si solar cell journal November 2007
Self-Assembled Monolayers of Thiolates on Metals as a Form of Nanotechnology journal April 2005
Mechanically flexible thin-film transistors that use ultrathin ribbons of silicon derived from bulk wafers journal May 2006
High performance plasmonic crystal sensor formed by soft nanoimprint lithography journal January 2005
Stress focusing for controlled fracture in microelectromechanical systems journal February 2007
Transfer printing by kinetic control of adhesion to an elastomeric stamp journal December 2005
Micro- and Nanopatterning Techniques for Organic Electronic and Optoelectronic Systems journal April 2007
Bendable single crystal silicon thin film transistors formed by printing on plastic substrates journal February 2005
Improved Surface Chemistries, Thin Film Deposition Techniques, and Stamp Designs for Nanotransfer Printing journal August 2004
A printable form of silicon for high performance thin film transistors on plastic substrates journal June 2004
Thin film silicon photovoltaics: Architectural perspectives and technological issues journal October 2009
Fabrication of Spherical Silicon Crystals by Dropping Method and Their Application to Solar Cells journal July 2007
Realization of Ultrahigh Photovoltages with Organic Photovoltaic Nanomodules journal November 2008
High voltage photovoltaic mini‐modules journal August 2008
Bulk solar grade silicon: how chemistry and physics play to get a benevolent microstructured material journal January 2009
Prediction of dopant ionization energies in silicon: The importance of strain journal December 2003
Near-surface defect distributions in Cu(In,Ga)Se2 journal May 2003
Recent progress on microcrystalline solar cells conference January 1997
27.5-percent silicon concentrator solar cells journal October 1986
Microstructures of high-growth-rate (up to 8.3nm/s) microcrystalline silicon photovoltaic layers and their influence on the photovoltaic performance of thin-film solar cells journal May 2008
Gigahertz operation in flexible transistors on plastic substrates journal May 2006
Printed Arrays of Aligned GaAs Wires for Flexible Transistors, Diodes, and Circuits on Plastic Substrates journal November 2006
Buckled and Wavy Ribbons of GaAs for High-Performance Electronics on Elastomeric Substrates journal November 2006
Controlled buckling of semiconductor nanoribbons for stretchable electronics journal December 2006
Top-Down Fabrication of Semiconductor Nanowires with Alternating Structures along their Longitudinal and Transverse Axes journal November 2005
Photolithographic Route to the Fabrication of Micro/Nanowires of III-V Semiconductors journal January 2005
Bendable GaAs metal-semiconductor field-effect transistors formed with printed GaAs wire arrays on plastic substrates journal August 2005
Fabricating Semiconductor Nano/Microwires and Transfer Printing Ordered Arrays of Them onto Plastic Substrates journal October 2004
Sliver® solar cells: A new thin-crystalline silicon photovoltaic technology journal November 2006
Binding and diffusion of a Si adatom around the type A step on Si(001) c (4×2) journal April 1995
A novel silicon texturization method based on etching through a silicon nitride mask journal January 2005
A Novel Low-Cost, High-Efficiency Micromachined Silicon Solar Cell journal January 2004
Buried-contact silicon solar cells journal January 1993
Unconventional Methods for Fabricating and Patterning Nanostructures journal May 1999
Thin-film poly-Si solar cells on glass substrate fabricated at low temperature journal August 1999
Ultrathin silicon solar microcells for semitransparent, mechanically flexible and microconcentrator module designs
  • Yoon, Jongseung; Baca, Alfred J.; Park, Sang-Il
  • Materials for Sustainable Energy: A Collection of Peer-Reviewed Research and Review Articles from Nature Publishing Group, p. 38-46 https://doi.org/10.1142/9789814317665_0005
book October 2010
24·5% Efficiency silicon PERT cells on MCZ substrates and 24·7% efficiency PERL cells on FZ substrates journal November 1999
Mechanism for stamp collapse in soft lithography journal December 2005
Spin on dopants for high-performance single-crystal silicon transistors on flexible plastic substrates journal March 2005

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