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Title: Single Ion Implant of Self-Aligned Poly-Silicon Nanostructures .

Conference ·
OSTI ID:1062806

Research Organization:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1062806
Report Number(s):
SAND2013-0857C
Resource Relation:
Conference: Proposed for presentation at the International workshop on Silicon Quantum electronics held February 7-8, 2013 in Villard-de-Lans, France.
Country of Publication:
United States
Language:
English