Single Ion Implant of Self-Aligned Poly-Silicon Nanostructures .
Conference
·
OSTI ID:1062806
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1062806
- Report Number(s):
- SAND2013-0857C
- Resource Relation:
- Conference: Proposed for presentation at the International workshop on Silicon Quantum electronics held February 7-8, 2013 in Villard-de-Lans, France.
- Country of Publication:
- United States
- Language:
- English
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